压电半导体的极化处理及性能研究

张鑫; 范翠英

doi:doi:10.16818/j.issn1001-5868.2019.06.020

半导体光电, 2019, 40 (6): 842, 网络出版: 2019-12-17

压电半导体的极化处理及性能研究

Study on Polarization and Properties of Piezoelectric Semiconductors

论文大纲

张鑫范翠英 ^*

作者单位

郑州大学力学与安全工程学院, 郑州 450001

压电半导体极化装置压电性能力电性能 piezoelectric semiconductor GaN GaN polarization device piezoelectric property electrical and mechanical properties

摘要

极化处理是压电半导体材料制备及构件设计中的关键工艺, 直接影响着其压电性能。根据夹层极化的方法, 研制出一种多样性极化实验装置, 解决了压电半导体的极化问题, 并对极化后的GaN材料性能进行了系统研究。实验结果表明: (1)极化使GaN材料具备了压电性能, 改变了其力电性能参数; (2)极化显著提高了压电半导体的导电能力, 改变了其弯曲强度。

Abstract

Polarization is a key process in the fabrication of piezoelectric semiconductor materials, which directly affects their piezoelectric properties. According to the method of interlayer polarization, a multi-polarization experimental device was developed to solve the polarization problem of piezoelectric semiconductors. The performance of GaN after polarization is systematically studied. It is found that the polarization makes GaN materials have piezoelectric properties to affect their mechanical and electrical properties. Polarization significantly improves the conductivity of piezoelectric semiconductors and changes the bending strength.

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张鑫, 范翠英. 压电半导体的极化处理及性能研究[J]. 半导体光电, 2019, 40(6): 842. ZHANG Xin, FAN Cuiying. Study on Polarization and Properties of Piezoelectric Semiconductors[J]. Semiconductor Optoelectronics, 2019, 40(6): 842.

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