考虑温度影响的高灵敏度微压力传感器
乔晶, 陈德媛, 段亚丽, 梁吴燕, 谷云斌. 考虑温度影响的高灵敏度微压力传感器[J]. 半导体光电, 2017, 38(6): 806.
QIAO Jing, CHEN Deyuan, DUAN Yali, LIANG Wuyan, GU Yunbin. High Sensitivity Micro Pressure Sensor Considering the Effects of Temperature[J]. Semiconductor Optoelectronics, 2017, 38(6): 806.
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乔晶, 陈德媛, 段亚丽, 梁吴燕, 谷云斌. 考虑温度影响的高灵敏度微压力传感器[J]. 半导体光电, 2017, 38(6): 806. QIAO Jing, CHEN Deyuan, DUAN Yali, LIANG Wuyan, GU Yunbin. High Sensitivity Micro Pressure Sensor Considering the Effects of Temperature[J]. Semiconductor Optoelectronics, 2017, 38(6): 806.
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