考虑温度影响的高灵敏度微压力传感器
[1] Lin S Y, Joannopoulos J D. Experimental demonstration of guiding and bending of electromagnetic waves in a photonic crystal[J]. Science, 1998, 282(5387): 274-276.
[2] Chow E, Lin S Y, Johnson S G, et al. Three-dimensional control of light in a two-dimensional photonic crystal slab[J]. Nature, 2000, 407(6807): 983-986.
[3] Noda S, Chutinan A, Imada M. Trapping and emission of photons by a single defect in a photonic bandgap structure[J]. Nature, 2000, 407(6804): 608-610.
[4] Akahane Y, Asano T, Song B S, et al. High-Q photonic nanocavity in a two-dimensional photonic crystal[J]. Nature, 2003, 425(6961): 944-947.
[5] Srinivasan K, Barclay P E, Painter O, et al. Experimental demonstration of a high quality factor photonic crystal microcavity[J]. Appl. Phys. Lett., 2003, 83(10): 1915-1917.
[6] Yang D, Tian H, Ji Y. The study of electro-optical sensor based on slotted photonic crystal waveguide[J]. Opt. Commun., 2011, 284(20): 4986-4990.
[7] Xu Z, Cao L, Gu C, et al. Micro displacement sensor based on line-defect resonant cavity in photonic crystal[J]. Opt. Express, 2006, 14(1): 298-305.
[9] Russell P. Photonic crystal fibers[J]. J. Lightwave Technol., 2007, 24(12): 4729-4749.
[10] Kunimasa S, Yuichiro S, Masanori K. Coupling characteristics of dual-core photonic crystal fiber couplers[J]. Opt. Express, 2003, 11(24): 3188-3195.
[11] Huang M. Stress effects on the performance of optical waveguides[J]. Solids & Structures, 2003, 40(7): 1615-1632.
[12] Olivier S, Benisty H, Weisbuch C, et al. Coupled-mode theory and propagation losses in photonic crystal waveguides[J]. Opt. Express, 2003, 11(13): 1490-1496.
[13] Waks E, Vuckovic J. Coupled mode theory for photonic crystal cavity-waveguide interaction[J]. Opt. Express, 2005, 13(13): 5064-5073.
[14] Lee C K, Thillaigovindan J, Chen C C, et al. Si nanophotonics based cantilever sensor[J]. Appl. Phys. Lett., 2008, 93(11): 113.
乔晶, 陈德媛, 段亚丽, 梁吴燕, 谷云斌. 考虑温度影响的高灵敏度微压力传感器[J]. 半导体光电, 2017, 38(6): 806. QIAO Jing, CHEN Deyuan, DUAN Yali, LIANG Wuyan, GU Yunbin. High Sensitivity Micro Pressure Sensor Considering the Effects of Temperature[J]. Semiconductor Optoelectronics, 2017, 38(6): 806.