应用激光, 2014, 34 (6): 557, 网络出版: 2015-01-13
水射流对于激光刻蚀晶体硅影响的试验研究
Experimental Study about Effect of Water-Jet to Laser Etching of Crystal Silicon
图 & 表
张崇天, 袁根福, 陈雪辉, 张程, 王海云. 水射流对于激光刻蚀晶体硅影响的试验研究[J]. 应用激光, 2014, 34(6): 557. Zhang Chongtian, Yuan Genfu, Chen Xuehui, Zhang Cheng, Wang Haiyun. Experimental Study about Effect of Water-Jet to Laser Etching of Crystal Silicon[J]. APPLIED LASER, 2014, 34(6): 557.