光子学报, 2016, 45 (6): 0605001, 网络出版: 2016-07-26
基于纳米压印的大角度衍射光学元件批量化制备方法
Fabrication of Large-angle Diffractive Optical Element Based on Nanoimprint Lithography
图 & 表
刘鑫, 张满, 庞辉, 史立芳, 曹阿秀, 邓启凌. 基于纳米压印的大角度衍射光学元件批量化制备方法[J]. 光子学报, 2016, 45(6): 0605001. LIU Xin, ZHANG Man, PANG Hui, SHI Li-fang, CAO A-xiu, DENG Qi-ling. Fabrication of Large-angle Diffractive Optical Element Based on Nanoimprint Lithography[J]. ACTA PHOTONICA SINICA, 2016, 45(6): 0605001.