直流磁控溅射法制备本征ZnO薄膜及光伏应用研究
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杨志军, 王波, 张静全, 冯良桓, 武莉莉, 李卫, 黎兵. 直流磁控溅射法制备本征ZnO薄膜及光伏应用研究[J]. 半导体光电, 2013, 34(1): 74. YANG Zhijun, WANG Bo, ZhANG Jingquan, FENG Lianghuan, WU Lili, LI Wei, LI Bing. Photovoltaic Applications and Characterization of Un-doped ZnO Films Prepared by Direct Current Magnetron Sputtering[J]. Semiconductor Optoelectronics, 2013, 34(1): 74.