激光与光电子学进展, 2019, 56 (12): 120501, 网络出版: 2019-06-13
多形貌多周期微纳米复合结构的制备及表征 
下载： 1334次封面文章
Preparation and Characterization of Multi-Morphological and Multi-Periodical Micro-Nano Composite Structures
图 & 表
图 1. 工艺原理及干涉光场分布图。(a)光刻工艺原理;(b)激光双光束干涉光刻工艺原理;(c)激光双光束干涉光场分布
Fig. 1. Principle of process and interference light field distribution. (a) Principle of lithography; (b) principle of two-beam laser interference lithography; (c) two-beam laser interference light field distribution
图 2. 微纳米复合结构制备流程及不同形貌掩模板显微镜照片。(a)光刻工艺与激光双光束干涉工艺相结合的微纳米复合结构制备流程;(b)条形;(c)矩形点阵;(d)圆形点阵;(e)六边形点阵
Fig. 2. Preparation process of micro-nano composite structure and microscope photos of masks with different patterns. (a) Preparation process of micro-nano composite structure using lithography combined with two-beam laser interference lithography;(b) strip; (c) rectangular lattices; (d) circular lattices; (e) hexagonal lattices
图 3. AFM照片。(a)条形微米光栅与纳米光栅平行分布的复合结构;(b)条形微米光栅与纳米光栅垂直分布的复合结构;(c)微米矩形点阵与纳米光栅相结合的复合结构;(d)微米圆形点阵和纳米光栅相结合的复合结构;(e)微米六边形点阵与纳米光栅相结合的复合结构
Fig. 3. AFM images. (a) Composite structure with micro-strip grating and nano-grating in parallel orientation; (b) composite structure with micro-strip grating and nano-grating in vertical orientation; (c) composite structure with micro-rectangular lattices combined with nano-grating; (d) composite structure with micro-circular lattices combined with nano-grating; (e) composite structure with micro-hexagonal lattices combined with nano-grating
图 4. 不同周期的微米光栅与纳米光栅相结合的复合结构AFM照片。(a) 4 μm;(b) 5 μm;(c) 6 μm
Fig. 4. AFM images of composite structures with nano-grating combined with micro-gratings with different periods. (a) 4 μm; (b) 5 μm; (c) 6 μm
图 5. AFM照片。(a)周期为2 μm的条形光栅结构;(b)周期为2 μm的微米光栅与纳米光栅平行分布的复合结构;(c)周期为2 μm的微米光栅与纳米光栅垂直分布的复合结构
Fig. 5. AFM images. (a) Strip-grating with period of 2 μm; (b) composite structure with nano-grating and micro grating with period of 2 μm in parallel orientation; (c) composite structure with nano-grating and micro grating with period of 2 μm in vertical orientation
图 6. IMI结构示意图及其结构中CH3NH3PbI3吸收光谱。(a)具有微纳米复合光栅结构的IMI结构示意图;(b)具有不同光栅结构的IMI结构中CH3NH3PbI3的吸收光谱
Fig. 6. Structural diagram of IMI and absorption spectra of CH3NH3PbI3 in IMI structure. (a) Structural diagram of IMI with micro-nano composite grating; (b) absorption spectra of CH3NH3PbI3 in IMI structures with different gratings
王康, 金玉, 刘昱玮, 李志祥, 骆昕, 吴志军, 相春平. 多形貌多周期微纳米复合结构的制备及表征[J]. 激光与光电子学进展, 2019, 56(12): 120501. Kang Wang, Yu Jin, Yuwei Liu, Zhixiang Li, Xin Luo, Zhijun Wu, Chunping Xiang. Preparation and Characterization of Multi-Morphological and Multi-Periodical Micro-Nano Composite Structures[J]. Laser & Optoelectronics Progress, 2019, 56(12): 120501.
PDF全文
