硅片激光弯曲成形的数值模拟与实验
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王续跃, 许卫星, 徐文骥, 吴东江, 康仁科, 郭东明. 硅片激光弯曲成形的数值模拟与实验[J]. 光学 精密工程, 2008, 16(4): 605. 王续跃, 许卫星, 徐文骥, 吴东江, 康仁科, 郭东明. Simulation and experiment of laser bending of silicon sheet[J]. Optics and Precision Engineering, 2008, 16(4): 605.
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