光散射学报, 2016, 28 (3): 214, 网络出版: 2016-11-30  

结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征

Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum
作者单位
1 华南师范大学光电子材料与技术研究所,广州 510631
2 中山大学光电材料与技术国家重点实验室,物理学院,广州 510275
3 广西大学物理科学与工程技术学院,广西相对论天体物理重点实验室,光电子材料与探测技术实验室,南宁 530004
4 马来西亚大学机械工程系,马来西亚 吉隆坡 50603
5 奥本大学物理学院,美国 奥本36849
6 西北工业大学理学院,教育部空间应用物理与化学重点实验室,陕西省光信息技术重点实验室,西安710072
引用该论文

谢灯, 丘志仁, 万玲玉, TIN Chin-che, 梅霆, 冯哲川. 结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征[J]. 光散射学报, 2016, 28(3): 214.

XIE Deng, QIU Zhi-ren, WAN Ling-yu, TIN Chin-che, MEI Ting, FENG Zhe-chuan. Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum[J]. The Journal of Light Scattering, 2016, 28(3): 214.

参考文献

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谢灯, 丘志仁, 万玲玉, TIN Chin-che, 梅霆, 冯哲川. 结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征[J]. 光散射学报, 2016, 28(3): 214. XIE Deng, QIU Zhi-ren, WAN Ling-yu, TIN Chin-che, MEI Ting, FENG Zhe-chuan. Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum[J]. The Journal of Light Scattering, 2016, 28(3): 214.

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