结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征
谢灯, 丘志仁, 万玲玉, TIN Chin-che, 梅霆, 冯哲川. 结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征[J]. 光散射学报, 2016, 28(3): 214.
XIE Deng, QIU Zhi-ren, WAN Ling-yu, TIN Chin-che, MEI Ting, FENG Zhe-chuan. Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum[J]. The Journal of Light Scattering, 2016, 28(3): 214.
[1] Yeh P.Electromagnetic propagation in birefringent layered media[J].J Opt Soc Am,1979,69:742-756.
[2] Yeh P.Optics of anisotropic layered media:a new 4×4 matrix algebra[J].Surf Sci,1980,96:41-53.
[3] Schubert M.Polarization-dependent optical parameters of arbitrarily anisotropic homogeneous layered systems[J].Phys Rev B,1996,53:4265-4274.
[4] Schubert M.Theory and application of generalized ellipsometry,in Handbook of Ellipsometry[M].New York:Springer,2005:637-717.
[5] Fujiwara H.Spectroscopic ellipsometry principles and applications[M].Hoboken:John Wiley & Sons Ltd,2007:158-176.
[6] Forouhi A R,Bloomer I.Optical dispersion relations for amorphous semiconductors and amorphous dielectrics[J].Phys Rev B,1986,34:7018-7026.
[7] Jellison G E,Modine F A.Parameterization of the optical functions of amorphous materials in the interband region[J].Appl Phys Lett,1996,69:371-373.
[8] Meneses D D S,Malki M,Echegut P.Structure and lattice dynamics of binary lead silicate glasses investigated by infrared spectroscopy[J].Journal of Non-Crystalline Solids,2006,352:769-776.
[9] Tiwald T E,Thompson D W,Woollam J A,et al.Application of IR variable angle spectroscopic ellipsometry to the determination of free carrier concentration depth profiles[J].Thin Solid Films,1998,313:661-666.
[10] Tanguy C.Analytical expression of the complex dielectric function for the Hulthén potential[J].Phys Rev B,1999,60:10660-10663.
[11] Feng Z C,Yang T R,Hou Y T.Infrared reflectance analysis of GaN epitaxial layers grown on sapphire and silicon substrates[J].Materials Science in Semiconductor Processing,2001,4:571-576.
[12] Palik E D.Handbook of Optical Constants of Solids[M].New York:Academic Press,1985.
谢灯, 丘志仁, 万玲玉, TIN Chin-che, 梅霆, 冯哲川. 结合椭圆偏振光谱与傅里叶红外光谱的宽禁带半导体薄膜光学特性表征[J]. 光散射学报, 2016, 28(3): 214. XIE Deng, QIU Zhi-ren, WAN Ling-yu, TIN Chin-che, MEI Ting, FENG Zhe-chuan. Characterization of Optical Properties of Wide Band Gap Semiconductor Thin Film with the Combination of Ellipsometry and Infrared Spectrum[J]. The Journal of Light Scattering, 2016, 28(3): 214.