二氧化硅增透膜微观结构与激光损伤阈值的调控

晏良宏; 吕海兵; 严鸿维; 赵松楠; 王韬; 李熙斌; 王海军; 袁晓东

doi:doi:10.3788/hplpb20122407.1745

强激光与粒子束, 2012, 24 (7): 1745, 网络出版: 2012-07-17

二氧化硅增透膜微观结构与激光损伤阈值的调控

Control of microstructure and laser induced damage threshold of antireflective silica films

论文大纲

晏良宏 ^*吕海兵严鸿维赵松楠王韬李熙斌王海军袁晓东

作者单位

中国工程物理研究院激光聚变研究中心，四川绵阳 621900

二氧化硅增透膜激光损伤阈值微观结构溶胶-凝胶 antireflective silica film laser induced damage threshold film microstructure sol-gel

摘要

采用溶胶-凝胶技术制备了二氧化硅增透膜，通过向溶胶中添加高分子聚乙烯醇缩丁醛(PVB)，调控胶体的粒径，进而控制膜层微观结构，研究膜层微观结构与激光损伤阈值的关系。纳米粒度仪和扫描探针显微镜测试表明：PVB加入溶胶后，控制了二氧化硅胶粒的生长，使二氧化硅胶粒生长更均匀，因而膜层的微观结构更均匀。当PVB质量分数为1%时，胶体粒径为15 nm，分散系数小于0.1。用该胶体镀膜，膜层均匀，表面粗糙度小于3.25 nm。并且PVB加入后增加了膜层胶粒间的黏附性，使得膜层强度增大。PVB加入使膜层的激光损伤阈值有所增加。当PVB的添加量为1%时，膜层的激光损失阈值从30.0 J/cm2 增加到40.1 J/cm2。膜层激光损伤阈值的增加与膜层微观均匀性和物理强度的增加有关。

Abstract

Polyvinyl butyral (PVB) modified antireflective silica films were deposited on fused silica substrates by sol-gel process. The effect of PVB on the microstructure and laser induced damage threshold (LIDT) of the films was investigated. The results of nanoparticle analyzer, and scanning probe microscope show that PVB molecules surround and control the growth of silica particles, resulting in a stable sol with uniformly distributed silica particles. As a result, the film deposited from these PVB modified sols possesses uniform microstructures. The optimal PVB modified silica film has surface roughness of 3.25 nm. The adhesive-resistance test exhibits that the strength of PVB modified silica film increases due to the bond reaction between PVB molecules and silica particles. The addition of PVB to silica sol increases the LITD of films. By adding 1.0% PVB to silica sol, the LIDT of films increases from 30.0 J/cm2 to 40.1 J/cm2. The increase in LIDT is attributed to the increase in film strength and uniformity of film microstructures as an effect of PVB modification.

参考文献

[1] Wu Guangming, Wang Jue, Shen Jun, et al. A novel route to control refractive index of sol-gel derived nano-porous silica films used as broadband antireflective coatings［J］. Materials Science and Engineering, 2000,B78: 135-139.

[2] Thomas I M, High laser damage threshold porous silica antireflective coating［J］. Applied Optics, 1986,25(9): 1481-1483.

[3] Xu Yao, Wu Dong, Sun Yuhan, et al. Comparative study on hydrophobic antireflective films from three kinds of methyl modified silica sols［J］. Journal of Non-crsytalline Solids, 2005,351: 258-266.

[4] Suratwala T I, Hanna M L, Miller E L, et al. Surface chemistry and trimethylsilyl functionalization of stober silica sols［J］. Journal of Non-Crystalline Solids, 2003,316: 349-363.

[5] Xu Yao, Wu Dong, Sun Yuhan, et al. Superhydrophobic antireflective silica films: fractal surface and laser induced damage thresholds［J］. Applied Optics, 2005,44(4): 527-533.

[6] Yolads B E. Investigations of porous oxides as an antireflective coating for glass surfaces［J］. Applied Optics, 1980，19(9): 1425-1429.

[7] 郭袁俊,祖小涛,蒋晓东,等.溶胶-凝胶SiO2酸性膜与碱膜的激光损伤行为［J］.强激光与粒子束,2008,20(6): 939-942.(Guo Yuanjun, Zu Xiaotao, Jiang Xiaodong, et al. Laser induced damage of sol-gel silica acid and basic thin films. High Power Laser and Particle Beams, 2008,20(6): 939-942)

[8] 张磊,徐耀,黄祖鑫,等.聚乙二醇对溶胶-凝胶SiO2增透膜激光损伤行为的影响［J］.强激光与粒子束,2005,17(5): 669-672.(Zhang Lei, Xu Yao, Huang Zuxin, et al. Effect of PEG on laser damage of sol-gel SiO2 anti-reflective coating. High Power Laser and Particle Beams, 2005,17(5): 669-672)

[9] 晏良宏,吕海兵,王海军,等.化学膜激光损伤行为［J］.强激光与粒子束,2009,21(11): 1601-1603.(Yan Lianghong, Lü Haibing, Wang Haijun, et al. Laser-induced damage of sol-gel coating. High Power Laser and Particle Beams, 2009,21(11): 1601-1603)

[10] Wang Xiaodong, Shen Jun. Sol-gel derived durable antireflective coating for solar glass［J］. Journal of Sol-gel Science and Technology, 2010,53: 322-327.

[11] Zhang Xinxiang, Cao Congrui, Xiao Bo, et al. Preparation and characterization of polyvinyl butyral/silica hybrid antireflective coating: effect of PVB on moisture-resistance and hydrophobicity［J］. Journal of Sol-gel Science and Technology, 2010,53(1): 79-84.

[12] Thomas I M. Method for the preparation of porous silica antireflection coatings varying in refractive index from 1.22 to 1.44［J］. Applied Optics, 31(28): 6145-6149.

晏良宏, 吕海兵, 严鸿维, 赵松楠, 王韬, 李熙斌, 王海军, 袁晓东. 二氧化硅增透膜微观结构与激光损伤阈值的调控[J]. 强激光与粒子束, 2012, 24(7): 1745. Yan Lianghong, Lü Haibing, Yan Hongwei, Zhao Songnan, Wang Tao, Li Xibin, Wang Haijun, Yuan Xiaodong. Control of microstructure and laser induced damage threshold of antireflective silica films[J]. High Power Laser and Particle Beams, 2012, 24(7): 1745.

二氧化硅增透膜微观结构与激光损伤阈值的调控

关于本站 Cookie 的使用提示

全站搜索

二氧化硅增透膜微观结构与激光损伤阈值的调控

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索