强激光与粒子束, 2008, 20 (4): 671, 网络出版: 2008-08-17  

用拉曼光谱测量离子注入引起的晶格应变

Meaurement of lattice strain induced by ion implantation using Raman spectroscopy
作者单位
1 北京师范大学,射线束技术与材料改性教育部重点实验室,北京,100875
2 北京师范大学,低能核物理研究所,北京,100875
3 北京市辐射中心,北京,100875
摘要
对于10个周期的AlAs/GaAs超晶格和25个周期的GaAs/Ga0.92In0.08As超晶格,在室温下进行0.28 MeV的Zn+注入,注入剂量为5×1013~5×1014 cm-2.通过拉曼光谱测量,定量地分析了由于离子注入所引起的晶格内应变.实验结果表明:在所选用的注入剂量下,由于离子注入引起的应变小于体材料GaAs的最大非驰豫应变值0.038,说明该注入条件下,注入区的结晶态仍然保持得比较好.在较高注入剂量下应变达到饱和,说明缺陷的产生和复合达到了平衡,从而形成了均衡的应变场分布.
Abstract
参考文献

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英敏菊, 董西亮. 用拉曼光谱测量离子注入引起的晶格应变[J]. 强激光与粒子束, 2008, 20(4): 671. 英敏菊, 董西亮. Meaurement of lattice strain induced by ion implantation using Raman spectroscopy[J]. High Power Laser and Particle Beams, 2008, 20(4): 671.

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