红外与激光工程, 2018, 47 (9): 0921001, 网络出版: 2018-10-06
HfO2-SiO2混合膜力学性能
Mechanical properties of HfO2-SiO2 mixed films
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卜笑庆, 张锦龙, 潘峰, 刘华松, 樊荣伟. HfO2-SiO2混合膜力学性能[J]. 红外与激光工程, 2018, 47(9): 0921001. Bu Xiaoqing, Zhang Jinlong, Pan Feng, Liu Huasong, Fan Rongwei. Mechanical properties of HfO2-SiO2 mixed films[J]. Infrared and Laser Engineering, 2018, 47(9): 0921001.
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