应用激光, 2016, 36 (1): 96, 网络出版: 2016-03-28
激光外差干涉仪在直线位移台滚转特性测量上的应用
Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage
引用该论文
柯有龙, 侯文玫, 句爱松, 杨卫, 罗佳林. 激光外差干涉仪在直线位移台滚转特性测量上的应用[J]. 应用激光, 2016, 36(1): 96.
Ke Youlong, Hou Wenmei, Ju Aisong, Yang Wei, Luo Jialin. Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage[J]. APPLIED LASER, 2016, 36(1): 96.
柯有龙, 侯文玫, 句爱松, 杨卫, 罗佳林. 激光外差干涉仪在直线位移台滚转特性测量上的应用[J]. 应用激光, 2016, 36(1): 96. Ke Youlong, Hou Wenmei, Ju Aisong, Yang Wei, Luo Jialin. Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage[J]. APPLIED LASER, 2016, 36(1): 96.