激光外差干涉仪在直线位移台滚转特性测量上的应用
柯有龙, 侯文玫, 句爱松, 杨卫, 罗佳林. 激光外差干涉仪在直线位移台滚转特性测量上的应用[J]. 应用激光, 2016, 36(1): 96.
Ke Youlong, Hou Wenmei, Ju Aisong, Yang Wei, Luo Jialin. Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage[J]. APPLIED LASER, 2016, 36(1): 96.
[1] 荣烈润.微位移机构综述[J].机电一体化, 2005(2): 6-11.
[2] 刘登云, 杨志刚, 程光明, 等.微位移机构的现状及趋势[J].机械设计与制造, 2007(1): 156-158.
[3] 黄祖尧.探索滚珠丝杠副市场的多元化前景[J/OL].MM现代制造, 2010[2011-12-12].http: //tech.newmaker.com/art_37138.html.
[4] HARRIS T A.Rolling bearing analysis[M].New York: John Wiley and Sons, Inc., 2001.
[5] 匡萃芳, 冯其波, 刘斌.滚转角测量方法综述[J].光学技术, 2004, 30(6): 699: 702.
[6] LE YANFEN, HOU WENMEI, HU KAI.High-sensitivity roll-angle interferometer[J].Optics Letter, 2013, 38(18): 3600-3603.
[7] 贺志超, 迟占铎, 黄雷.用激光干涉仪检测双丝杠驱动加工中心的方法与评定[J].计量学报, 2009, 30(5A): 47-50.
[8] Zygo ZMI straightness interferometer accessory manual[Z]. OMP-0225G. December 2001.
柯有龙, 侯文玫, 句爱松, 杨卫, 罗佳林. 激光外差干涉仪在直线位移台滚转特性测量上的应用[J]. 应用激光, 2016, 36(1): 96. Ke Youlong, Hou Wenmei, Ju Aisong, Yang Wei, Luo Jialin. Application of Laser Heterodyne Interferometer in the Roll Characteristics Measurement of Linear Displacement Stage[J]. APPLIED LASER, 2016, 36(1): 96.
PDF全文
