Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings

Yuanfang Li; Huoyao Chen; Stefanie Kroker; Thomas Käsebier; Zhengkun Liu; Keqiang Qiu; Ying Liu; Ernst-Bernhard Kley; Xiangdong Xu; Yilin Hong; Shaojun Fu

doi:doi:10.3788/COL201614.090501

Chinese Optics Letters, 2016, 14 (9): 090501, Published Online: Aug. 3, 2018

Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings Download： 1250次

Yuanfang Li ¹Huoyao Chen ¹Stefanie Kroker ^2,3,4Thomas Käsebier ²Zhengkun Liu ¹Keqiang Qiu ¹Ying Liu ^1,*Ernst-Bernhard Kley ²Xiangdong Xu ¹Yilin Hong ¹Shaojun Fu ¹

Author Affiliations

¹ National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

² Institut für Angewandte Physik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, Jena 07743, Germany

³ Technische Universität Braunschweig, Laboratory for Emerging Nanometrology, Pockelsstr. 14, Braunschweig 38106, Germany

⁴ Physikalisch-Technische Bundesanstalt, Bundesallee 100, Braunschweig 38116, Germany

Figures & Tables

Fig. 1. Principles for fabricating a grating with a constant line spacing by NFH. (a) Layout I. (b) Layout II.

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Fig. 2. Sketch of interface reflections and their suppressions with ARCs during NFH. (a) Setup without ARCs. (b) Setup with ARC_ M and ARC_R.

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Fig. 3. Simulated reflectance of the substrate to be patterned as a function of the thickness of the resist and of the ARC_R at a wavelength of 441.6 nm and an incidence angle of 32°.

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Fig. 4. Schematic setup of the NFH.

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Fig. 5. Comparison of the far field diffraction spots of the resist grating after NFH. (a) Layout I without the suppression of interface reflections, (b) Layout I with ARCs, and (c) Layout II with the refractive index liquid.

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Fig. 6. Measured efficiency at the −1st order of the gold-coated laminar grating samples as a function of wavelength at an incidence angle of 76.78°. The fabrication differences of the samples are indicated by the legend.

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Fig. 7. Diffraction efficiency angular spectrum of the gold-coated laminar grating samples at an incidence angle of 76.78° and a wavelength of 13 nm. The fabrication differences of the samples are indicated by the legend.

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Table1. Measured Parameters of the Grating Samples

Grating Fabrication	Groove Density (lines/mm)	Groove Depth (nm)	Duty Cycle
Using NFH without reflection suppression	$2397.8 \pm 0.3$	$14.05 \pm 0.14$	$0.50 \pm 0.01$
Using NFH with ARCs	$2397.9 \pm 0.2$	$10.04 \pm 0.16$	$0.50 \pm 0.01$
Using NFH with refractive index liquid	$2398.2 \pm 0.2$	$11.24 \pm 0.45$	$0.60 \pm 0.03$

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Yuanfang Li, Huoyao Chen, Stefanie Kroker, Thomas Käsebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, Shaojun Fu. Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings[J]. Chinese Optics Letters, 2016, 14(9): 090501.

Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings Download： 1250次

Fig. 1. Principles for fabricating a grating with a constant line spacing by NFH. (a) Layout I. (b) Layout II.

Fig. 2. Sketch of interface reflections and their suppressions with ARCs during NFH. (a) Setup without ARCs. (b) Setup with ARC_ M and ARC_R.

Fig. 3. Simulated reflectance of the substrate to be patterned as a function of the thickness of the resist and of the ARC_R at a wavelength of 441.6 nm and an incidence angle of 32°.

Fig. 4. Schematic setup of the NFH.

Fig. 5. Comparison of the far field diffraction spots of the resist grating after NFH. (a) Layout I without the suppression of interface reflections, (b) Layout I with ARCs, and (c) Layout II with the refractive index liquid.

Fig. 6. Measured efficiency at the −1st order of the gold-coated laminar grating samples as a function of wavelength at an incidence angle of 76.78°. The fabrication differences of the samples are indicated by the legend.

Fig. 7. Diffraction efficiency angular spectrum of the gold-coated laminar grating samples at an incidence angle of 76.78° and a wavelength of 13 nm. The fabrication differences of the samples are indicated by the legend.

Table1. Measured Parameters of the Grating Samples

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Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings Download： 1250次

Fig. 1. Principles for fabricating a grating with a constant line spacing by NFH. (a) Layout I. (b) Layout II.

Fig. 2. Sketch of interface reflections and their suppressions with ARCs during NFH. (a) Setup without ARCs. (b) Setup with ARC_ M and ARC_R.

Fig. 3. Simulated reflectance of the substrate to be patterned as a function of the thickness of the resist and of the ARC_R at a wavelength of 441.6 nm and an incidence angle of 32°.

Fig. 4. Schematic setup of the NFH.

Fig. 5. Comparison of the far field diffraction spots of the resist grating after NFH. (a) Layout I without the suppression of interface reflections, (b) Layout I with ARCs, and (c) Layout II with the refractive index liquid.

Fig. 6. Measured efficiency at the −1st order of the gold-coated laminar grating samples as a function of wavelength at an incidence angle of 76.78°. The fabrication differences of the samples are indicated by the legend.

Fig. 7. Diffraction efficiency angular spectrum of the gold-coated laminar grating samples at an incidence angle of 76.78° and a wavelength of 13 nm. The fabrication differences of the samples are indicated by the legend.

Table1. Measured Parameters of the Grating Samples

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