基于改进型控制变量法的脉冲激光打孔研究 下载: 783次
Study on Pulse Laser Drilling Based on Improved Parameter Control Method
图 & 表
图 1. 毫秒脉冲激光打孔系统示意图
Fig. 1. Schematic of millisecond pulse laser drilling system
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图 2. 通孔锥度的计算
Fig. 2. Calculation of via-hole taper
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图 3. 穿透检测原理示意图。(a)检测装置示意图;(b)脉冲信号示意图
Fig. 3. Schematic of penetration detection principle. (a) Schematic of detection device; (b) schematic of pulse signal
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图 4. 离焦量对通孔入口、出口直径的影响
Fig. 4. Influence of defocusing amount on entrance and end diameters of via-hole
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图 5. 离焦量对通孔脉冲个数阈值的影响
Fig. 5. Influence of defocusing amount on threshold of pulse number
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图 6. 不同离焦量下通孔截面图和通孔锥度变化图。(a) -2.8 mm;(b) -1.8 mm;(c) 0.8 mm;(d) 0 mm;(e) 0.8 mm;(f) 1.8 mm;(g) 2.8 mm;(h)通孔锥度变化图
Fig. 6. Cross sections and taper a change of via-hole drilled under different defocusing amounts. (a) -2.8 mm; (b) -1.8 mm; (c) 0.8 mm; (d) 0 mm; (e) 0.8 mm; (f) 1.8 mm; (g) 2.8 mm; (h) taper change of via-hole
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图 7. 扩束比原理图
Fig. 7. Schematic of beam expansion ratio
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图 8. 扩束比对通孔入口、出口直径的影响
Fig. 8. Influence of beam expanding ratio on entrance and end diameters of via-hole
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图 9. 扩束比对通孔脉冲个数阈值的影响
Fig. 9. Influence of beam expanding ratio on threshold of pulse number
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图 10. 不同扩束比下通孔截面图和通孔锥度变化图。(a) 1;(b) 1.8;(c) 2.8;(d) 3.8;(e) 4.8;(f) 5.8;(g)通孔锥度变化图
Fig. 10. Cross sections and taper change of via-hole drilled under different beam expanding ratios. (a) 1; (b) 1.8; (c) 2.8; (d) 3.8; (e) 4.8; (f) 5.8;(g) taper change of via-hole
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图 11. 氩气中打孔的实验结果
Fig. 11. Experimental results of drilling holes in argon
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图 12. 脉冲重复频率对通孔入口、出口直径的影响
Fig. 12. Influence of pulse repetition frequency on entrance and end diameters of via-hole
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图 13. 脉冲重复频率对脉冲个数阀值的影响
Fig. 13. Influence of pulse repetition frequency on threshold of pulse number
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图 14. 不同脉冲重复频率下通孔截面图和通孔锥度变化图。(a) 15 Hz; (b) 25 Hz; (c) 35 Hz; (d) 45 Hz; (e) 65 Hz; (f) 85 Hz; (g) 100 Hz;(h)通孔锥度变化图
Fig. 14. Cross sections and taper change of via-hole drilled under different pulse repetition frequencies. (a) 15 Hz; (b) 25 Hz; (c) 35 Hz; (d) 45 Hz; (e) 65 Hz; (f) 85 Hz; (g) 100 Hz;(h) taper change of via-hole
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表 1镍基高温合金GH4037的化学成分
Table1. Chemical composition of nickel-based superalloy GH4037
Composition | C | Cr | Ni | W | Mo | Al | Ti | V |
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Mass fraction /% | 0.03-0.1 | 13-16 | Allowance | 5-7 | 2-4 | 1.7-2.3 | 1.8-2.3 | 0.1-0.5 | Composition | Fe | B | Ce | Mn | Si | P | S | Cu | Mass fraction /% | ≤5 | ≤0.02 | ≤0.02 | ≤0.5 | ≤0.4 | ≤0.015 | ≤0.01 | ≤0.07 |
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表 2改进型控制变量法
Table2. Improved control variable method
Defocusing amount /mm | -2.8 | -1.8 | -0.8 | 0 | 0.8 | 1.8 | 2.8 |
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Threshold of pulse number | N1 | N2 | N3 | N4 | N5 | N6 | N7 |
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表 3不同离焦量下改进型控制变量法与传统控制变量法打孔效率对比
Table3. Comparison of drilling efficiency between improved control variable method and traditional control variable method under different defocusing amounts
Item | Defocusing amount /mm |
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-2.8 | -1.8 | -0.8 | 0 | 0.8 | 1.8 | 2.8 |
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Ni | 15 | 8 | 7 | 6 | 18 | 30 | 40 | Nt | 50 | 50 | 50 | 50 | 50 | 50 | 50 | R /% | 70 | 84 | 86 | 88 | 64 | 40 | 20 |
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表 4不同扩束比下改进型控制变量法与传统控制变量法打孔效率对比
Table4. Comparison of drilling efficiency between improved control variable method and traditional control variable method under different beam expanding ratios
Item | Beam expanding ratio |
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1 | 1.8 | 2.8 | 3.8 | 4.8 | 5.8 | |
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Ni | 21 | 15 | 9 | 6 | 10 | 25 | | Nt | 30 | 30 | 30 | 30 | 30 | 30 | | R /% | 30.00 | 50.00 | 70.00 | 80.00 | 66.67 | 16.67 | |
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表 5不同脉冲重复频率下改进型控制变量法与传统控制变量法打孔效率对比
Table5. Comparison of drilling efficiency between improved control variable method and traditional control variable method under different pulse repetition frequencies
Item | Pulse repetition frequency /Hz |
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15 | 28 | 35 | 45 | 65 | 85 | 100 |
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Ni | 41 | 30 | 15 | 9 | 6 | 9 | 11 | Nt | 55 | 55 | 55 | 55 | 55 | 55 | 55 | R /% | 25.45 | 45.45 | 72.73 | 83.64 | 89.09 | 83.64 | 80.00 |
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李涛, 夏凯波, 任乃飞, 高福强, 张文, 田佳男, 范永胜. 基于改进型控制变量法的脉冲激光打孔研究[J]. 激光与光电子学进展, 2020, 57(19): 191403. Tao Li, Kaibo Xia, Naifei Ren, Fuqiang Gao, Wen Zhang, Jianan Tian, Yongsheng Fan. Study on Pulse Laser Drilling Based on Improved Parameter Control Method[J]. Laser & Optoelectronics Progress, 2020, 57(19): 191403.