红外与激光工程, 2003, 32 (5): 452, 网络出版: 2006-04-28
新型非制冷高速高灵敏度红外探测器的研制
Novel uncooled infrared detector with high speed and high sensitivity
摘要
介绍了一种新型非制冷高速高灵敏度硅基电容式红外探测器的工作原理,描述了探测器的设计思想及制作工艺.该探测器采用密封于微气腔的特殊气体吸收红外辐射以改变探测器微电容的原理来进行红外探测,制作工艺采用微机械加工技术.对样品的测试表明这种红外探测器能探测红外信号.
Abstract
A novel uncooled silicon capacitive infrared detector with high speed and sensitivity is introduced.The design idea and fabrication processes of this infrared detector are described in detail. The detector operates on infrared absorption by special gas sealed in a micro-cavity, which results in its micro-capacitance change. All fabrication processes are realized by MEMS technology. The experimental results indicate that the prototype samples have good sense of infrared signal.
参考文献
[1] 陈允魁.红外吸收光谱法及其应用[M]. 上海:上海交通大学出版社,1993.
[2] 徐芝纶. 弹性力学[M]. 北京:高等教育出版社,1982.
[3] 白长城,张兴海,方湖宝,等. 红外物理[M]. 北京:电子工业出版社,1989.
[4] 黄庆安.硅微机械加工技术[M].北京:科学出版社,1996.
[5] 谢国章.硅微机械的制造与应用[M].北京:电子工业出版社,1991.
刘铮, 李兰, 邹德恕, 杨道虹, 徐晨, 沈光地. 新型非制冷高速高灵敏度红外探测器的研制[J]. 红外与激光工程, 2003, 32(5): 452. 刘铮, 李兰, 邹德恕, 杨道虹, 徐晨, 沈光地. Novel uncooled infrared detector with high speed and high sensitivity[J]. Infrared and Laser Engineering, 2003, 32(5): 452.