ICPCVD-SiNx对GaN/AlGaN基紫外探测器的钝化效果的研究
刘秀娟, 张燕, 李向阳. ICPCVD-SiNx对GaN/AlGaN基紫外探测器的钝化效果的研究[J]. 半导体光电, 2015, 36(1): 20.
LIU Xiujuan, ZHANG Yan, LI Xiangyang. Study on the ICPCVD-SiNx Passivation of InGaN Ultraviolet Detector[J]. Semiconductor Optoelectronics, 2015, 36(1): 20.
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刘秀娟, 张燕, 李向阳. ICPCVD-SiNx对GaN/AlGaN基紫外探测器的钝化效果的研究[J]. 半导体光电, 2015, 36(1): 20. LIU Xiujuan, ZHANG Yan, LI Xiangyang. Study on the ICPCVD-SiNx Passivation of InGaN Ultraviolet Detector[J]. Semiconductor Optoelectronics, 2015, 36(1): 20.
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