用于纳米精度大范围位移测量的半导体激光干涉仪
王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. 用于纳米精度大范围位移测量的半导体激光干涉仪[J]. 中国激光, 2001, 28(5): 455.
王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455.
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王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. 用于纳米精度大范围位移测量的半导体激光干涉仪[J]. 中国激光, 2001, 28(5): 455. 王学锋, 王向朝, 钱锋, 卢洪斌, 宋松, 步扬. Laser Diode Interferometer Used to Measure Displacements in Large Range with a Nanometer Accuracy[J]. Chinese Journal of Lasers, 2001, 28(5): 455.
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