纳米计算机断层扫描成像技术进展综述 下载: 2669次封面文章
Review on Development of Nano-Computed Tomography Imaging Technology
1 天津大学精密仪器与光电子工程学院精密测试技术及仪器国家重点实验室, 天津 300072
2 天津大学南昌微技术研究院, 天津 300072
图 & 表
图 1. 投影放大成像原理图
Fig. 1. Principle of projection magnification imaging
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图 2. 利用改制的SEM装置实现纳米CT成像的原理图[9]。(a) X射线点光源投影放大光路图; (b)改造SEM获得纳米光源的主要构造及部件;(c)锥束CT成像系统的几何原理;(d)断层数据集的虚拟截面
Fig. 2. Schematic diagram of nano-CT imaging using modified SEM device[9]. (a) Optical path diagram of X-ray point source projection magnification; (b) main structure and components of modified SEM for obtaining nano-light source; (c) geometric principle of cone-beam CT imaging system; (d) virtual cross section of tomographic dataset
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图 3. 光纤耦合探测器结构示意图[27]
Fig. 3. Structural diagram of coupling of fiber and detector[27]
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图 4. 透镜耦合探测器的结构示意图[29]
Fig. 4. Structural diagram of coupling of lens and detector[29]
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图 5. 光学显微镜与X射线显微镜对照图。(a)可见光显微镜成像原理图;(b)软X射线显微镜成像原理图;(c)硬X射线显微镜成像原理图
Fig. 5. Comparison of optical microscope and X-ray microscope. (a) Imaging schematic of visible light microscope; (b) imaging schematic of soft X-ray microscopy; (c) imaging schematic of hard X-ray microscope
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图 6. 利用波带片搭建X射线纳米CT成像系统[39]
Fig. 6. X-ray nano CT imaging system with zone plate[39]
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图 7. 波带片结构示意图。(a)经典波带片结构示意图;(b)多层膜劳厄镜结构示意图[48]
Fig. 7. Structural diagram of zone plate. (a) Structural diagram of classical zone plate; (b) structural diagram of multilayer film Laue mirror[48]
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图 8. 复合透镜结构示意图。(a)平面复合折射透镜;(b)球形复合折射透镜[91]
Fig. 8. Structural diagram of composite lens. (a) Planar composite refractive lens; (b) spherical composite refractive lens[91]
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图 9. 椭圆面型布拉格放大器示意图[95]
Fig. 9. Schematic diagram of elliptical type Bragg amplifier[95]
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图 10. X射线布拉格放大器的组成结构示意图[96]
Fig. 10. Diagram of structure of X-ray Bragg amplifier[96]
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图 11. 毛细管聚焦原理示意图
Fig. 11. Schematic diagram of capillary focusing
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图 12. 单毛细管聚焦示意图(左)和多毛细管聚焦示意图(右)
Fig. 12. Single capillary focusing diagram (left) and multi-capillary focusing diagram (right)
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表 1纳米CT成像系统分类
Table1. Classification of nano-CT imaging systems
Principle | Type |
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Imaging principle | Absorbing contrast based nano-CT | Phase contrast based nano-CT | Property of X-ray | Hard X-ray nano-CT | Soft X-ray nano-CT | Amplificationmechanism | Projection magnifying nano-CT | X-ray microscopy nano-CT |
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表 2常用X射线聚焦元件分类与重要参数汇总
Table2. Classification and important parameters of common X-ray focusing components
Category | Component | Beam diameter /nm | Energy /keV | Efficiency /% | Ref. No |
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Diffracting | Fresnel zone plates | 35 | 8 | 10-70 | [24,38-45] | Multilayer zone plates | 5 | 13.8 | 10-20 | [13,46-47] | Multilayer Laue lenses | 10 | 14.6 | 10-30 | [48-54] | Absorbing | Pinholes/slits | 1000 | 11 | | [55-56] | Reflecting | Capillaries | 50 | 8 | 80 | [12,57-59] | Waveguides | 10 | 15 | <25 | [25,60] | Kirkpatrick-Baez mirrors | 7 | 20 | >50 | [52,61-63] | Refracting | Spherical compound refractive lenses | 1000 | 8 | several 10% | [11, 63-64] | Parabolic compound refractive lenses | 50 | 21 | >60 | [26,65-70] | Kinoform lenses | 100 | 8 | >50 | [71-72] |
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吕寒玉, 邹晶, 赵金涛, 胡晓东. 纳米计算机断层扫描成像技术进展综述[J]. 激光与光电子学进展, 2020, 57(14): 140001. Hanyu Lü, Jing Zou, Jintao Zhao, Xiaodong Hu. Review on Development of Nano-Computed Tomography Imaging Technology[J]. Laser & Optoelectronics Progress, 2020, 57(14): 140001.