Linnik白光干涉仪自动对焦及光程差最小化
李勇, 吴奎, 卢荣胜, 董敬涛. Linnik白光干涉仪自动对焦及光程差最小化[J]. 光电工程, 2012, 39(11): 8.
LI Yong, WU Kui, LU Rong-sheng, DONG Jing-tao. Automated Method of Focusing and Minimizing OPD in Linnik White Light Interferometry[J]. Opto-Electronic Engineering, 2012, 39(11): 8.
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李勇, 吴奎, 卢荣胜, 董敬涛. Linnik白光干涉仪自动对焦及光程差最小化[J]. 光电工程, 2012, 39(11): 8. LI Yong, WU Kui, LU Rong-sheng, DONG Jing-tao. Automated Method of Focusing and Minimizing OPD in Linnik White Light Interferometry[J]. Opto-Electronic Engineering, 2012, 39(11): 8.
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