光电工程, 2012, 39 (11): 8, 网络出版: 2012-11-22
Linnik白光干涉仪自动对焦及光程差最小化
Automated Method of Focusing and Minimizing OPD in Linnik White Light Interferometry
图 & 表
李勇, 吴奎, 卢荣胜, 董敬涛. Linnik白光干涉仪自动对焦及光程差最小化[J]. 光电工程, 2012, 39(11): 8. LI Yong, WU Kui, LU Rong-sheng, DONG Jing-tao. Automated Method of Focusing and Minimizing OPD in Linnik White Light Interferometry[J]. Opto-Electronic Engineering, 2012, 39(11): 8.