激光与光电子学进展, 2017, 54 (10): 101203, 网络出版: 2017-10-09   

基于激光干涉的电容位移传感器非线性误差标定方法 下载: 568次

Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry
作者单位
装备学院激光推进及其应用国家重点实验室, 北京 101416
摘要
针对微推力测量中电容位移传感器需要频繁标定非线性误差的问题, 提出了一种基于激光干涉的现场标定方法。标定原理为: 在直线位移台上同时调节可动角隅棱镜与测量目标的位置, 进而改变干涉光路光程差及电容位移传感器极板间距, 以激光干涉测量结果为基准, 采用线性拟合方法, 对传感器非线性误差进行标定。搭建了基于常用光学元件的干涉光路, 对应用于微推力测量中不同量程的传感器进行标定。在分析干涉光强变化特点的基础上, 确定了干涉条纹数计算方法, 得到干涉光路的位移测量精度为66.5 nm。实验验证了该校准装置的实用性和准确性, 最后对标定结果、传感器输出非线性误差以及影响激光干涉测量精度的主要因素进行了分析, 得到激光干涉测量总误差为67.2 nm。
Abstract
In order to solve the problem of frequent calibration of nonlinear error for capacitive displacement sensors in micro-thrust measurement, an in-situ calibration method based on laser interferometry is studied. The calibration principle is that the optical path difference and capacitive displacement sensor plate spacing are changed simultaneously by adjustment and measurement of the positions of movable corner prism and object through the linear displacement, and the nonlinear error of sensor is calibrated by the linear fitting method based on the measuring results of laser interference. The interferometric optical path based on common optical elements is built and sensors with different measuring ranges are calibrated in micro-thrust measurement. Based on the analysis of characteristics of the interference intensity, the calculation method of interference fringe number is determined. The measuring accuracy of interference light path displacement is 66.5 nm. The practicability and accuracy of the calibration device are verified by experiment. Finally, the results of calibration, the nonlinear sensor output relative error and the main factors affecting the laser interference measurement accuracy are analyzed. The total error is 67.2 nm.
参考文献

[1] Du B, Zhao Y, Yao W, et al. Review of thrust measurement techniques for micro-thrusters[J]. Journal of Measurement Science and Instrumentation, 2013, 4(2): 103-110.

[2] Phipps C R, Luke J R, Helgeson W, et al. Performance test results for the laser-powered micro thruster[C]. AIP Conference Proceedings, 2006, 830(1): 224-234.

[3] Markowitz S M, Ahmad A, Hyde T T, et al. LISA propulsion module separation study[J]. Classical and Quantum Gravity, 2005, 22(10): S413-S419.

[4] D′ Souza B C, Ketsdever A D. Investigation of time dependent forces on a nano-Newton-second impulse balance[J]. Review of Scientific Instruments, 2005, 76(1): 015105.

[5] 洪延姬, 周伟静, 王广宇. 微推力测量方法及其关键问题分析[J]. 航空学报, 2013, 34(10): 2287-2299.

    Hong Yanji, Zhou Weijing, Wang Guangyu. Methods of micro thrust measurement and analysis of its key issues[J]. Acta Aeronautica et Astronautica Sinica, 2013, 34(10): 2287-2299.

[6] Zhou W, Hong Y, Chang H. A microNewton thrust stand for average thrust measurement of pulsed microthruster[J]. Review of Scientific Instruments, 2013, 84(12): 125115.

[7] 葛川, 张德福, 李朋志, 等. 电容式位移传感器的线性度标定与不确定度评定[J]. 光学 精密工程, 2015, 23(9): 2546-2552.

    Ge Chuan, Zhang Defu, Li Pengzhi, et al. Linearity calibration and uncertainty evaluation for capacitance displacement sensor[J]. Optics & Precision Engineering, 2015, 23(9): 2546-2552.

[8] 于源, 丁美莹, 张连凯. 位移传感器特性区域直线拟合算法分析[J]. 传感技术学报, 2010, 23(6): 840-843.

    Yu Yuan, Ding Meiying, Zhang Liankai. The algorithmic analysis of linear approximation for characteristic region of displacement sensor[J]. Chinese Journal of Sensors & Actuators, 2010, 23(6): 840-843.

[9] Karadag B, Inalhan G. Design, production & testing of a micro-pulsed plasma thruster for nanosatellites[C]. International Conference on Student Small Satellites, 2012: 57-63.

[10] 张德福, 葛川, 李显凌, 等. 电容传感器线性度标定平台[J]. 光学 精密工程, 2016, 24(1): 143-151.

    Zhang Defu, Ge Chuan, Li Xianling, et al. Linearity calibration platform of capacitive sensors[J]. Optics & Precision Engineering, 2016, 24(1): 143-151.

[11] 张德福, 李显凌, 葛川, 等. 面向电容式传感器线性度标定的柔性微动机构设计[J]. 仪器仪表学报, 2016, 37(6): 1210-1217.

    Zhang Defu, Li Xianling, Ge Chuan, et al. Design of compliant micro-motion mechanism for linearity calibration of capacitive displacement sensors[J]. Chinese Journal of Scientific Instrument, 2016, 37(6):1210-1217.

[12] 池峰, 朱煜, 张志平, 等. 双频激光干涉测量中的环境补偿技术[J]. 中国激光, 2014, 41(4): 0408004.

    Chi Feng, Zhu Yu, Zhang Zhiping, et al. Environment compensation technologies in dual-frequency laser interferometer measurement system[J]. Chinese J Lasers, 2014, 41(4): 0408004.

[13] Zhang S, Kiyono S. An absolute calibration method for displacement sensors[J]. Measurement, 2001, 29(1): 11-20.

[14] 师中华, 杨宝喜, 胡小邦, 等. 基于低相干干涉技术的大量程高精度镜面间距测量[J]. 光学学报, 2016, 36(6): 0612001.

    Shi Zhonghua, Yang Baoxi, Hu Xiaobang, et al. Lens surface distance measurement with large range and high precision based on low coherence interferometry[J]. Acta Optica Sinica, 2016, 36(6): 0612001.

[15] 张建雄, 孙宝元, 戴恒震, 等. 高线性非接触式电容位移传感器[J]. 仪表技术与传感器, 2006(1): 6-7.

    Zhang Jianxiong, Sun Baoyuan, Dai Hengzhen, et al. High linear non-contact displacement capacitive sensor[J]. Instrument Technique and Sensor, 2006(1): 6-7.

[16] 叶继飞, 洪延姬. 基于扭秤的激光干涉差动测量微小冲量方法[J]. 应用光学, 2013, 34(6): 990-994.

    Ye Jifei, Hong Yanji. Laser interference differential measurement of micro impulse based on torsion balance[J]. Journal of Applied Optics, 2013, 34(6): 990-994.

[17] 李建欣, 崔艳军, 朱日宏, 等. 基于小波变换的激光干涉微位移变化量测量方法[J]. 中国激光, 2012, 39(8): 0808002.

    Li Jianxin, Cui Yanjun, Zhu Rihong, et al. Micro-displacement variation measurement by using laser interference based on wavelet transform[J]. Chinese J Lasers, 2012, 39(8): 0808002.

[18] 单慧洁, 杨宏志, 杨苏辉, 等. 激光强度起伏及相位噪声对光学双频探测的影响[J]. 光学学报, 2016, 36(12): 1212005.

    Shan Huijie, Yang Hongzhi, Yang Suhui, et al. Effects of laser intensity fluctuation and phase noise on dual-frequency laser detection[J]. Acta Optica Sinica, 2016, 36(12): 1212005.

[19] 何杰铃, 魏凌, 杨金生, 等. 基于变形镜激光束整形系统中的相位拟合优化方法[J]. 激光与光电子学进展, 2016, 53(2): 020101.

    He Jieling, Wei Ling, Yang Jinsheng,et al. Phase fitting optimization method to laser beam shaping system based on deformable mirror[J]. Laser & Optoelectronics Progress, 2016, 53(2): 020101.

[20] 仝小刚, 王国利, 周效信, 等. 基于高能光电子非对称性的少周期激光载波包络相位确定[J]. 光学学报, 2016, 36(3): 0319002.

    Tong Xiaogang, Wang Guoli, Zhou Xiaoxin, et al. Carrier envelope phase determination for few-cycle laser pulses based on asymmetry of ionized high-energy electrons[J]. Acta Optica Sinica, 2016, 36(3): 0319002.

王大鹏, 金星, 周伟静, 李南雷. 基于激光干涉的电容位移传感器非线性误差标定方法[J]. 激光与光电子学进展, 2017, 54(10): 101203. Wang Dapeng, Jin Xing, Zhou Weijing, Li Nanlei. Nonlinear Error Calibration Method for Capacitive Displacement Sensor Based on Laser Interferometry[J]. Laser & Optoelectronics Progress, 2017, 54(10): 101203.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!