单频激光干涉测振仪的非线性误差主动补偿法

张埔榛; 吴军; 黄庚华

doi:doi:10.3788/lop55.081204

激光与光电子学进展, 2018, 55 (8): 081204, 网络出版: 2018-08-13

单频激光干涉测振仪的非线性误差主动补偿法下载： 728次

Active Compensation Method of Nonlinear Error in Homodyne Laser Interferometer for Vibration Measurement

论文大纲

张埔榛 ^1,2吴军 ²黄庚华 ^1,2

作者单位

¹ 中国科学院大学, 北京 100049

² 中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083

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摘要

为了提高单频激光干涉测振系统的测量精度，提出了一种基于伪极值的非线性误差实时主动补偿方法，该方法使用伪极值计算直流偏置误差和不等幅误差，通过矢量相位校正运算抑制非正交误差。实验结果表明：该方法降低了测量期间因激光器功率漂移、Abbe误差导致的正交信号椭圆轨迹螺旋化形变，以及因数字信号传输误码造成的异常数据对非线性误差补偿的影响。在搭建的单频激光干涉测振系统中，使用伪极值法结合矢量相位校正运算方法可将周期性剩余误差峰峰值降低至0.8 nm，比传统的极值法具有更好的非线性误差抑制效果，且该方法不需要复杂的运算，保持了良好的实时性。

Abstract

In order to improve the measurement precision of the homodyne laser interferometer for vibration measurement, we propose a real-time active nonlinear compensation method based on the pseudo-extremums. According to this method, the pseudo-extremums instead of the extremums are used to determinate the direct current (DC) offset and alternating current (AC) amplitude difference. Then the quadrature phase shift is suppressed by the operation for vector phase correction. Experimental results show that the method proposed can reduce the error caused by the bit error of digital signal transmission, laser power drift and Abbe error during measurement. Laser power drift and Abbe error make the elliptic trajectory of quadrature signals into a spiral shape. The peak-to-valley amplitude of residual error can be reduced to 0.8 nm by using the pseudo-extremums method with the operation for vector phase correction, which has a more effective suppression for nonlinear error than the conventional extremums method. Besides, the method proposed does not need complex calculation and remains good instantaneity.

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张埔榛, 吴军, 黄庚华. 单频激光干涉测振仪的非线性误差主动补偿法[J]. 激光与光电子学进展, 2018, 55(8): 081204. Zhang Puzhen, Wu Jun, Huang Genghua. Active Compensation Method of Nonlinear Error in Homodyne Laser Interferometer for Vibration Measurement[J]. Laser & Optoelectronics Progress, 2018, 55(8): 081204.

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