国防科技大学 机电工程与自动化学院 湖南超精密加工技术重点实验室, 湖南 长沙 410073
为进一步提升熔石英元件的激光损伤阈值, 研究了氢氟酸(HF)动态酸刻蚀条件下磁流变抛光工艺对熔石英元件激光损伤特性的影响规律。首先, 采用不同工艺制备熔石英元件, 测量它们的表面粗糙度。然后, 采用飞行时间-二次离子质谱法(OF-SIMS )检测磁流变加工前后熔石英元件中金属杂质元素的含量和深度; 采用1-on-1方法测试激光损伤阈值, 观测损伤形貌, 并对损伤坑的形态进行统计。最后, 分析了磁流变抛光工艺提升熔石英损伤阈值的原因。与未经磁流变处理的熔石英元件进行了对比, 结果显示: 磁流变抛光使熔石英元件的零概率激光损伤阈值提升了23.3%, 金属杂质元素含量也显著降低, 尤其是对熔石英激光损伤特性有重要影响的Ce元素被完全消除。得到的结果表明, 磁流变抛光工艺能够被用作HF酸动态酸刻蚀的前道处理工艺。
磁流变抛光 熔石英 光学元件 氢氟酸(HF)动态刻蚀 激光损伤阈值 Magnetorheological Finishing(MRF) fused silica optical component optical element Hydrogen Fluoride(HF) acid dynamic etching Laser-Induced Damage Threshold( LIDT) 光学 精密工程
2016, 24(12): 2931
Author Affiliations
Abstract
1 College of Mechatronic Engineering and Automation, National University of Defense Technology, Changsha 410073, China
2 No. 63880 Unit of P.L.A., Key Laboratory of Electro-Optical Countermeasures Test & Evaluation Technology, Luoyang 471003, China
3 Hu’nan Key Laboratory of Ultra-precision Machining Technology, Changsha 410073, China
4 College of Optoelectric Science and Engineering, National University of Defense Technology, Changsha 410073, China
A model that considers both thermal expansion and thermo-optical effects is developed to investigate the transmission variation of optical coatings when they are exposed to an intense laser beam. Our results indicate that a higher gradient of the transmission spectrum curve at a certain wavelength leads to a more evident variation of the coating transmission. Three customized HfO2–SiO2 multilayer coatings with different transmission spectra are used to measure the transmitted power under the irradiation of a 1080 nm continuous-fiber laser. Excellent agreement is found between the experimental result and the theoretical prediction. Our result is helpful for the improvement of such devices in the application of high-power laser systems.
240.0310 Thin films 310.6188 Spectral properties Chinese Optics Letters
2015, 13(5): 052401
