作者单位
摘要
1 陕西省薄膜技术与光学检测重点实验室 西安工业大学,陕西 西安 710021
2 西安应用光学研究所,陕西 西安 710065
基于观察瞄准镜系统中胶合目镜对滤光片的使用需求,设计了一种用于瞄准镜光学系统的截止滤光片,消除了滤光片的半波孔,压缩了通带波纹。采用电子束热蒸发技术制备了滤光片并测试其透过率,在400 nm~630 nm的平均透过率为95.76%,在655 nm~800 nm的平均透过率为0.06%,样片通过了盐雾测试和机械牢固度测试,制备结果满足设计需求。
短波通滤光片 薄膜制备 半波孔消除 通带波纹压缩 short-wave pass filter thin film preparation half-wave hole elimination passband ripple compression 
应用光学
2022, 43(2): 221
Author Affiliations
Abstract
Shaanxi Provincial Key Laboratory of Thin Films Technology and Optical Test, Xi’an Technological University, Xi’an 710021, China
The plasma-enhanced chemical vapor deposition (PECVD) technique is well suited for fabricating optical filters with continuously variable refractive index profiles; however, it is not clear how the optical and structural properties of thin films differ when deposited on different substrates. Herein, silicon nitride films were deposited on silicon, fused silica, and glass substrates by PECVD, using silane and ammonia, to investigate the effects of the substrate used on the optical properties and structures of the films. All of the deposited films were amorphous. Further, the types and amounts of Si-centered tetrahedral Si–SivN4-v bonds formed were based upon the substrates used; Si–N4 bonds with higher elemental nitrogen content were formed on Si substrates, which lead to obtaining higher refractive indices, and the Si–SiN3 bonds were mainly formed on glass and fused silica substrates. The refractive indices of the films formed on the different substrates had a maximum difference of 0.05 (at 550 nm), the refractive index of SiNx films formed on silicon substrates was 1.83, and the refractive indices of films formed on glass were very close to those formed on fused silica. The deposition rates of these SiNx films are similar, and the extinction coefficients of all the films were lower than 10?4.
thin films plasma-enhanced chemical vapor deposition optical properties structural properties substrate materials 
Chinese Optics Letters
2020, 18(8): 083101
作者单位
摘要
西安工业大学陕西省薄膜技术与光学检测重点实验室,陕西 西安 710021
等离子体增强化学气相沉积(PECVD)技术在制备高激光损伤阈值的激光薄膜和渐变折射率结构的光学薄膜方面有独特的优点。通过大量的工艺研究,人们掌握了调控光学薄膜材料折射率和降低消光系数的方法。目前已知薄膜的最低折射率为1.16±0.01(632.8 nm波长处),有效拓展了薄膜材料的折射率范围。当薄膜的消光系数小于10 -3时,薄膜折射率的可变范围为1.33~2.06,基本满足光学薄膜设计和制造的需求,且获得了大量中间折射率的制备工艺,基本满足光学薄膜设计和制造的需求。此外,薄膜制备工艺的稳定性和重复性也通过实验得到了验证。目前,PECVD技术已被用于制备多层光学薄膜,如减反膜、高反膜、Rugate滤光片、陷波滤光片,薄膜的光谱特性及抗激光损伤特性明显优于传统光学薄膜。特别是在渐变折射率薄膜的制造领域,PECVD技术有广阔的工程应用前景。
激光与光电子学进展
2020, 57(13): 130003
作者单位
摘要
1 西安工业大学 陕西省薄膜技术与光学检测重点实验室, 陕西 西安 710032
2 微光夜视技术重点实验室, 陕西 西安710065
为了获得制备钛酸镧(LaTiO3)薄膜的最优工艺条件, 采用电子束热蒸发技术在K9基底上制备了单层LaTiO3激光薄膜。研究了不同工艺条件对LaTiO3薄膜激光损伤特性的影响。研究结果表明, 对LaTiO3薄膜激光损伤阈值(laser-induced damage threshold, LIDT)影响最大的工艺条件是沉积温度, 其次是工作真空度, 最后是蒸发束流。获得了制备单层LaTiO3激光薄膜的最优工艺条件: 沉积温度175 ℃、工作真空度2.0×10-2 Pa、蒸发束流120 mA(8 keV); 证明了最优工艺下制备的LaTiO3薄膜具有良好的激光损伤特性、稳定性以及重复性, 所制备LaTiO3薄膜的激光损伤阈值为16.9 J/cm2(1 064 nm, 10 ns)。
薄膜 激光损伤 工艺优化 thin films LaTiO3 LaTiO3 laser-induced damage process optimization 
应用光学
2015, 36(6): 948

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