钛酸镧薄膜的制备及工艺优化

为了获得制备钛酸镧(LaTiO3)薄膜的最优工艺条件, 采用电子束热蒸发技术在K9基底上制备了单层LaTiO3激光薄膜。研究了不同工艺条件对LaTiO3薄膜激光损伤特性的影响。研究结果表明, 对LaTiO3薄膜激光损伤阈值(laser-induced damage threshold, LIDT)影响最大的工艺条件是沉积温度, 其次是工作真空度, 最后是蒸发束流。获得了制备单层LaTiO3激光薄膜的最优工艺条件: 沉积温度175 ℃、工作真空度2.0×10-2 Pa、蒸发束流120 mA(8 keV); 证明了最优工艺下制备的LaTiO3薄膜具有良好的激光损伤特性、稳定性以及重复性, 所制备LaTiO3薄膜的激光损伤阈值为16.9 J/cm2(1 064 nm, 10 ns)。

Abstract

In order to obtain the optimum deposition processes of monolayer LaTiO3 films, monolayer LaTiO3 films were prepared by electron-beam thermal evaporation technique. The influence of experiment parameters on laser damage properties of LaTiO3 films was investigated. Experiment results show that the greatest influence on the laser-induced damage threshold (LIDT) of LaTiO3 films process conditions is the deposition temperature, followed by the gas pressure, the last is the electron beam current. The optimum deposition processes of LaTiO3 films are obtained: the deposition temperature is 175 ℃, the gas pressure is 2.0×10-2 Pa, the electron beam current is 120 mA(8 KeV). It is proved that the LaTiO3 films prepared under the optimum processes conditions has nice laser damage characteristics and the optimum processes conditions possess stability and repeatability. The laser-induced damage threshold of LaTiO3 films is 16.9 J/cm2(1 064 nm, 10 ns).

参考文献

[1] 田苗苗, 李春杰, 贺小光, 等. 高功函数的钛酸镧掺杂氧化铟透明导电薄膜的制备与光电特性研究[J]. 发光学报, 2012, 33(10): 1055-1059.

Tian Miaomiao, Li Chunjie, He Xiaoguang, et al. Preparation and characteristics of high work-function and ultraviolet-luminescence lanthanum titanate-doped indium oxide thin films[J]. Chinese Journal of Luminescence, 2012, 33(10): 1055-1059.

[2] 董小燕, 龚斌, 李雅丽. 光学薄膜及其应用方面的研究[J]. 物理与工程, 2012, 22(5): 14-18.

Dong Xiaoyan, Gong Bin, Li Yali. Study on optical film and relevant applications [J]. Physics and Engineering, 2012, 22(5): 14-18.

[3] 杨爱粉, 张佳, 李刚, 等. 用于定向红外对抗的中波红外激光器技术[J]. 应用光学, 2015, 36(1): 119-125.

Yang Aifen, Zhang Jia, Li Gang, et al. Technology of MWIR laser in directed infrared countermeasure systems [J]. Journal of Applied Optics, 2015, 36(1): 119-125.

[4] 占美琼. 提高光学薄膜激光损伤阈值的途径[J]. 上海第二工业大学学报, 2010, 27(4): 304-308.

Zhan Meiqiong. Enhancement of the LIDT of optical coatings [J]. Journal of Shanghai Second Polytechnic University, 2010, 27(4): 304-308.

[5] 王忠生, 王兴媛, 孙继凤. 激光的应用现状与发展趋势[J]. 光机电信息, 2007 (8): 27-33.

Wang Zhongsheng, Wang Xingyuan, Sun Jifeng. Current status of laser applications and its developing trend [J]. Ome Information, 2007 (8): 27-33.

[6] Detlev R, Marco J, Kai S. Laser damage thresholds of optical coatings [J]. Thin Solid Films, 2009, 518(5): 1607-1613.

[7] Marcu T, Todea M, Gligor I, et al. Effect of surface conditioning on the flow ability of Ti6Al7Nb powder for selective laser melting applications [J]. Applied Surface Science, 2012, 258(7): 3276-3282.

[8] Xia Zhilin, Xu Qi, Guo Peitao, et al. Laser-Induced damage characteristic of porous alumina optical films[J]. Optics Communications, 2011, 284(16-17): 4033-4037.

[9] Ling Xiulan,Zhao Yuanan,Shao Jianda, et al. Effect of two organic contamination modes on laser-induced damage of high reflective films in vacuum[J]. Thin Solid Films, 2010, 519(1): 296-300.

[10] Yan Lianghong,Lyu Haibing,Wang Chengcheng, et al. Hydro-oleophobic silica antireflective films with high laser-damage threshold[J]. Optics & Laser Technology, 2011, 43(1): 232-236.

[11] 李金丽,刘全校,许文才.光学薄膜及其发展现状[J].化工新型材料,2012, 40(2): 14-20.

Li Jinli, Liu Quanxiao, Xu Wencai. Optical thin film and its current situation [J]. New Chemical Materials, 2012, 40(2): 14-20.

[12] 刘春玲, 王春武, 王广德,等. 电子束蒸镀H4膜工艺及其在808 nm激光器腔面膜上的应用[J]. 中国激光, 2010, 37(12): 3140-3144.

Liu Chunling, Wang Chunwu, Wang Guangde, et al. Process investigation of H4 thin film prepared by electron beam evaporation and application on laser diodes cavity coatings [J]. Chinese Journal of Lasers, 2010, 37(12): 3140-3144.

[13] Herrera G,Jimenez-Mier J,Chavira E. Layered-structural monoclinic-orthorhombic perovskite La2Ti2O7 to orthorhombic LaTiO3 phase transition and their microstructure characterization [J]. Materials Characterization, 2014, 89: 13-22.

[14] 段华英, 王星明, 张碧田,等. 高折射率镀膜材料LaTiO3[J]. 稀有金属, 2008, 32(3): 392-394.

Duan Huaying, Wang Xingming, Zhang Bitian, et al. Coating material of LaTiO3 with high refractive index [J]. Chinese Journal of Rare Metals, 2008, 32(3): 392-394.

[15] 李文涛, 梁艳, 王炜华, 等. LaTiO3(110)薄膜分子束外延生长的精确控制和表面截止层的研究[J]. 物理学报, 2015, 64(7): 078103-1-078103-8.

Li Wentao, Liang Yan, Wang Weihua, et al. Precise control of LaTiO3(110) film growth by molecular beam epitaxy and surface termination of the polar film [J]. Acta Phy. Sin., 2015, 64(7): 078103-1-078103-8.

[16] 杨永亮, 刘国军, 付秀华, 等. 激光敌我识别系统中滤光膜的研制[J]. 光学学报, 2012, 32(1): 0131002-1-0131002-7.

Yang Yongliang, Liu Guojun, Fu Xiuhua, et al. Study and fabrication of filter film in laser identification between friend or foe system [J]. Acta Optica Sinica, 2012, 32(1): 0131002-1-0131002-7.

[17] 郭芳, 徐均琪, 苏俊宏, 等. 辐照激光能量对SiO2薄膜特性及结构的影响[J]. 应用光学, 2014, 35(2): 348-352.

Guo Fang, Xu Junqi, Su Junhong, et al. Effect of laser irradiation energy on optical properties and morphology of SiO2 films [J]. Journal of Applied Optics, 2014, 35(2): 348-352.

[18] 徐均琪, 郭芳, 苏俊宏, 等. 激光薄膜的设计与制备[J]. 表面技术, 2014, 43(2): 75-78.

Xu Junqi, Guo Fang, Su Junhong, et al. Design and preparation of thin films for laser system [J]. Surface Technology, 2014, 43(2): 75-78.

[19] Trnch R J, Kozlowski M R, Chow R. Investigation of microstructure of coatings for high power lasers by non-optical techniques [J]. SPIE,1994, 2253: 596-602.

杭良毅, 徐均琪, 程耀进, 苏俊宏. 钛酸镧薄膜的制备及工艺优化[J]. 应用光学, 2015, 36(6): 948. Hang Liangyi, Xu Junqi, Cheng Yaojin, Su Junhong. Preparation of LaTiO₃ films and process optimization[J]. Journal of Applied Optics, 2015, 36(6): 948.

钛酸镧薄膜的制备及工艺优化

关于本站 Cookie 的使用提示

全站搜索

钛酸镧薄膜的制备及工艺优化

相关论文

相关资讯

关于本站 Cookie 的使用提示

全站搜索