1 National Engineering Laboratory for TFT-LCD Technology, Department of Electrical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
2 Key Laboratory for Laser Plasmas (Ministry of Education) and Department of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China
3 Collaborative Innovation Center of IFSA (CICIFSA), Shanghai Jiao Tong University, Shanghai 200240, China
4 Department of Xiamen Institute of Measurement and Testing, Xiamen 361000, China
5 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China