同济大学精密光学工程技术研究所物理系，上海 200092
太阳光谱中重要的He-Ⅱ谱线(波长30.4 nm)的观测对于研究太阳活动和日地空间环境具有重要意义，实现空间极紫外太阳观测需要采用多层膜作为反射元件。研究了工作在30.4 nm的Mg基多层膜。以反射率最高为评价函数设计了多层膜，采用直流磁控溅射技术制备了SiC/Mg,B4 C/Mg和C/Mg多层膜，用X 射线衍射仪测量了多层膜的结构。研究表明虽然B4C/Mg多层膜理论反射率最高，但实际制备结果显示，SiC/Mg多层膜的成膜质量最好，反射率最高。同步辐射反射率测量表明：在入射角10°时实测的SiC/Mg多层膜反射率为44.6%。
薄膜光学 多层膜 磁控溅射 极紫外 He-II谱线 反射率
Author Affiliations
Abstract
1 Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092
2 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029
The B4C/Mo/Si high reflectivity multilayer mirror was designed for He-II radiation (30.4 nm) using the layer-by-layer method. The theoretical peak reflectivity was up to 38.2% at the incident angle of 5 degrees. The B4C/Mo/Si multilayer was fabricated by direct current magnetron sputtering and measured at the National Synchrotron Radiation Laboratory (NSRL) of China. The experimental reflectivity of the B4C/Mo/Si multilayer at 30.4 nm was about 32.5%. The promising performances of the B4C/Mo/Si multilayer mirror could be used for the construction of solar physics instrumentation.
极紫外光学 多层膜 磁控溅射 同步辐射 He-II谱线 230.4170 Multilayers 340.7470 X-ray mirrors 340.6720 Synchrotron radiation Chinese Optics Letters
2006, 4(10): 611
