Huijuan Xia 1,2Shumin Yang 1,3,*Liansheng Wang 1,3Jun Zhao 1,3[ ... ]Renzhong Tai 1,3,***
Author Affiliations
Abstract
1 Shanghai Institute of Applied Physics, Shanghai 201800, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 Shanghai Synchrotron Radiation Facility, Shanghai Advanced Research Institute, Shanghai 201204, China
Achromatic Talbot lithography (ATL) with high resolution has been demonstrated to be an excellent technique for large area periodic nano-fabrication. In this work, the uniformity of pattern distribution in ATL was studied in detail. Two ATL transmission masks with ~50% duty cycle in a square lattice were illuminated by a spatial coherent broadband extreme ultraviolet beam with a relative bandwidth of 2.38%. Nonuniform dot size distribution was observed by experiments and finite-difference time-domain simulations. The sum of the two kinds of diffraction patterns, with different lattice directions (45° rotated) and different intensity distributions, results in the final nonuniform pattern distribution.
220.3740 Lithography 220.4241 Nanostructure fabrication 
Chinese Optics Letters
2019, 17(6): 062201
Author Affiliations
Abstract
Strong-Field and Ultrafast Photonics Lab, Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
The effect of material surface morphology on the periodic subwavelength of nano-structures induced by a femtosecond (fs) laser was investigated systematically from the initial surface roughness, the different scratches, the pre-formed ripples, and the “layer-carving” technology experiments. The results of the comparative experiments indicate that the initial surface conditions of the target surface have no obvious effects on the spatial structured periods (SSPs) and the ripple orientation of the periodic nano-structures induced by a fs laser, which agreed well with the foretold present surface two-plasmon resonance (STPR) model. Furthermore, different shapes of nano-grids with high regularity and uniformity were obtained by fs-laser fabrication.
320.2250 Femtosecond phenomena 240.5770 Roughness 220.4241 Nanostructure fabrication 
Chinese Optics Letters
2018, 16(7): 073202
Fengyou Yang 1,2†Haoran Zhang 1,2†Huimin Feng 1,2†Jianjie Dong 1[ ... ]Qian Liu 1,3,*
Author Affiliations
Abstract
1 CAS Center for Excellence in Nanoscience, National Center for Nanoscience and Technology, Beijing 100190, China
2 University of Chinese Academy of Sciences, Beijing 100049, China
3 MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Applied Physics Institute, School of Physics, Nankai University, Tianjin 300457, China
Natural surface-enhanced Raman spectroscopy (SERS) chips based on plants or insects have gained increased attention due to their facile characteristics and low costs. However, such chips remain a major challenge for practical application because of poor reproducibility and stability as well as unavoidable damage to the surface structure during coating metal and uncontrolled dehydration. By using a simple wrinkling method, we develop a new route to fabricate a low-cost bionic SERS chip for practical detection. Inspired by the taro leaf, we fabricate a SERS chip with a super-hydrophobic and plasmonic micro/nano dual structure, and its structure parameters can be optimized. Compared with the natural taro-leaf SERS chip, our artificial chip exhibits Raman signals with an order of magnitude higher sensitivity (10 9 M) and enhancement factor (107) under the illumination of weak laser radiation, demonstrating that our SERS chip has great potential in biological detection. The excellent performances of our bionic SERS chip are attributed to a synergy of optimized micro-wrinkle and nano-nest, which is verified by experiment and simulation. We believe our bionic chip could be a promising candidate in practical application due to its merits such as simple fabricating process, optimizable structure, low cost, excellent homogeneity, high sensitivity, and stability.
Nanostructure fabrication Surface-enhanced Raman scattering 
Photonics Research
2018, 6(2): 02000077
Author Affiliations
Abstract
1 Laboratory of Optical Physics, Institute of Physics, Chinese Academy of Sciences, P.O. Box 603, Beijing 100190, China
2 School of Physics, South China University of Technology, Guangzhou 510640, China
We theoretically design and experimentally realize a broadband ultrasmall microcavity for sensing a varying number of microparticles whose diameter is 2 μm in a freely suspended microfiber. The performance of the microcavity is predicted by the theory of one-dimensional photonic crystals and verified by the numerical simulation of finite-difference time domain and the experimental characterization of reflection and transmission spectra. A penetrating length into the reflectors as small as about four periods is demonstrated in the numerical simulation, giving rise to an ultrasmall effective mode volume that can increase the sensitivity and spatial resolution of sensing. Moreover, a reflection band as large as 150 nm from the reflectors of the microcavity has been realized in silica optical microfiber in the experiment, which highly expands the wavelength range of sensing. Our proposed microcavity integrated into a freely suspended optical fiber offers a convenient and stable method for long-distance sensing of microparticles without the need for complicated coupling systems and is free from the influence of substrates.
Fiber optics sensors Microstructured fibers Nanostructure fabrication 
Photonics Research
2017, 5(3): 03000143
Author Affiliations
Abstract
1 State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai 200062, China
2 Department of Mathematics and Physics, Shanghai Dianji University, Shanghai 201306, China
This Letter reports the formation of periodic surface structures on Ni–Fe film irradiated by a single femtosecond laser pulse. A concave lens with a focus length of 150 mm is placed in front of an objective (100×, NA=0.9), which transforms the Gaussian laser field into a ring distribution by the Fresnel diffraction. Periodic ripples form on the ablation area after the irradiation of a single femtosecond laser pulse, which depends on the laser polarization and laser fluence. We propose that the ring structure of the laser field leads to a similar transient distribution of the permittivity on the sample surface, which further launches the surface plasmon polaritons. The interaction of the incident laser with surface plasmon polaritons dominates the formation of periodic surface structures.
220.4241 Nanostructure fabrication 160.3900 Metals 240.6700 Surfaces 320.7090 Ultrafast lasers 
Chinese Optics Letters
2017, 15(2): 022201
Author Affiliations
Abstract
State Key Laboratory of High Performance and Complex Manufacturing, College of Mechanical and Electrical Engineering, Central South University, Changsha 410083, China
A constant elastic alloy is a widely used material with a high elastic modulus and an excellent wave velocity consistency. Different morphologies on the constant elastic alloy surface are observed through femtosecond laser irradiation. When the laser average fluence is set to 0.58 J/cm2 and 200 laser pulses, with the increasing depth of distilled water, the period of the laser-induced periodic surface structures (LIPSS) becomes shorter accordingly. The higher the ethanol concentration is, the more spot-shaped structures will be formed among the surface structures when the depth of the coverage of ethanol is 2 mm. The period of the LIPSS reaches its maximum when the concentration of ethanol is 80%.
320.2250 Femtosecond phenomena 220.4241 Nanostructure fabrication 100.0118 Imaging ultrafast phenomena 
Chinese Optics Letters
2017, 15(2): 021404
Author Affiliations
Abstract
1 Institute of Micro-Nano Photoelectron and Electromagnetic Technology Innovation, School of Electronics and Information Engineering, Hebei University of Technology, Tianjin 300401, China
2 Key Laboratory of Electronic Materials and Devices of Tianjin, Tianjin 300401, China
3 Semiconductor Lighting Technology Research and Development Center, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
A versatile nanosphere composite lithography (NSCL) combining both the advantages of multiple-exposure nanosphere lens lithography (MENSLL) and nanosphere template lithography (NSTL) is demonstrated. By well controlling the development, washing and the drying processes, the nanosphere monolayer can be well retained on the substrate after developing and washing. Thus the NSTL can be performed based on MENSLL to fabricate nanoring, nanocrescent and hierarchical multiple structures. The pattern size and the shape can be systemically tuned by shrinking nanospheres by using dry etching and adjusting the tilted angle. It is a natural nanopattern alignment process and possesses a great potential in the scope of nano-science due to its low cost, simplicity, and versatility for variuos nano-fabrications.
220.4241 Nanostructure fabrication 110.4235 Nanolithography 
Chinese Optics Letters
2017, 15(6): 062201
白正元 1,2,*张龙 1王康鹏 1,3
作者单位
摘要
1 中国科学院上海光学精密机械研究所 中国科学院强激光材料重点实验室, 上海 201800
2 中国科学院大学, 北京 100049
3 爱尔兰都柏林圣三一学院 物理系, 都柏林 爱尔兰
有序贵金属纳米结构由于其本身所特有的光学响应及灵活调控能力, 在微纳光电子材料与器件研究领域得到了广泛应用。在众多相关研究中, 如何实现金(Au)纳米周期结构的大面积快速制备是人们关心的重要问题之一。采用纳米球自组装刻蚀方法, 在大孔周期结构模板内部成功制备了新型二维Au纳米阵列, 并有效避免了杂散Au纳米颗粒的产生。通过进一步的工艺优化和参量控制, 实现了Au纳米颗粒尺寸的灵活调控, 并探讨了其结构形成的物理机理。光学测试研究结果揭示了二维Au纳米阵列的表面等离子体吸收与散射响应, 并证明其在近红外飞秒脉冲激励下具有显著的双光子吸收(饱和)效应。该研究结果在太阳能电池, 光开关及材料微纳制备等领域具有潜在应用。
纳米结构制备 金纳米阵列 自组装 非线性光学吸收 nanostructure fabrication Au nano array self-assembling nonlinear optical absorption 
红外与激光工程
2017, 46(5): 0534001
作者单位
摘要
1 Data Storage Institute, (A*STAR) Agency for Science Technology and Research, 2 Fusionopolis Way, 138634, Singapore
2 Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen 361005, China
3 Department of Electrical and Computer Engineering, National University of Singapore, 4 Engineering Drive 3, 117576, Singapore
surface-enhanced Raman scattering nanostructure fabrication plasmonics metal-insulator-metal 
光电工程
2017, 44(2): 245
Author Affiliations
Abstract
Institute of Laser Engineering, Beijing University of Technology, Beijing 100124, China
During the formation of sub-wavelength ripples, the initial surface plasmon (SP)-laser interference plays an important role. In this Letter, the effects of grating structures on the distribution of the absorbed laser intensity, SP-laser coupling, free electron distributions, and ablation shapes are investigated by the plasma model, taking into consideration both the laser wave-particle duality and the transient localized changes of material properties. The simulation results show that the grating structures can strongly enhance the energy absorption and SP-laser coupling, which makes the fabrication of sub-wavelength ripples more efficient. It is also found that the ablation shapes, in terms of ablation depths and sub-wavelength ripples periods, are strongly related to the grating structures, which can be used to control micro/nanostructures precisely and uniformly.
140.3390 Laser materials processing 220.4241 Nanostructure fabrication 320.7090 Ultrafast lasers 
Chinese Optics Letters
2016, 14(1): 011404

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!