Author Affiliations
Abstract
1 School of Electronic and Information Engineering, Hebei University of Technology, Tianjin 300401, China
2 School of Science, Northeast Electric Power University, Jilin 132012, China
The emergent two-dimensional (2D) material, tin diselenide (SnSe2), has garnered significant consideration for its potential in image capturing systems, optical communication, and optoelectronic memory. Nevertheless, SnSe2-based photodetection faces obstacles, including slow response speed and low normalized detectivity. In this work, photodetectors based on SnS/SnSe2 and SnSe/SnSe2 p?n heterostructures have been implemented through a polydimethylsiloxane (PDMS)?assisted transfer method. These photodetectors demonstrate broad-spectrum photoresponse within the 405 to 850 nm wavelength range. The photodetector based on the SnS/SnSe2 heterostructure exhibits a significant responsivity of 4.99 × 103 A?W?1, normalized detectivity of 5.80 × 1012 cm?Hz1/2?W?1, and fast response time of 3.13 ms, respectively, owing to the built-in electric field. Meanwhile, the highest values of responsivity, normalized detectivity, and response time for the photodetector based on the SnSe/SnSe2 heterostructure are 5.91 × 103 A?W?1, 7.03 × 1012 cm?Hz1/2?W?1, and 4.74 ms, respectively. And their photodetection performances transcend those of photodetectors based on individual SnSe2, SnS, SnSe, and other commonly used 2D materials. Our work has demonstrated an effective strategy to improve the performance of SnSe2-based photodetectors and paves the way for their future commercialization.
two-dimensional materials tin diselenide heterostructures broad-spectrum photodetectors 
Journal of Semiconductors
2024, 45(3): 032703
作者单位
摘要
1 1.理学院, 天津理工大学, 天津 300384
2 2.材料科学与工程学院 显示材料与光电器件教育部重点实验室, 天津市光电显示材料与器件重点实验室, 功能材料国家级实验教学示范中心, 天津理工大学, 天津 300384
带隙1.1~1.4 eV的锡铅混合卤化物钙钛矿是单结太阳能电池光电转换效率(PCE)接近Shockley-Queisser (S-Q)理论效率极限值的理想材料。钙钛矿薄膜垂直方向上的化学组分梯度会通过影响能带结构影响载流子的传输和分离, 因此对锡铅混合钙钛矿薄膜的结晶过程进行控制十分重要。本研究发现使用不同剂量的反溶剂制备锡铅混合钙钛矿会形成不同的垂直组分梯度, 并且随反溶剂用量增大薄膜表面铅含量增加。调整溶剂组分可以控制锡铅混合钙钛矿的垂直组分梯度, 增大溶剂中V(DMSO):V(DMF)可以形成底部富铅而表面富锡的垂直组分梯度。当铅基前驱液溶剂中V(DMSO):V(DMF)最优化为1 : 2时, 相比于1 : 4的对照组, 器件在标准光照条件下的开路电压从0.725 V提高到0.769 V, 短路电流密度从30.95 mA·cm-2提高到31.65 mA·cm-2, PCE从16.22%提升到接近18%。利用SCAPS软件数值模拟进一步证明了垂直组分梯度的必要性, 当钙钛矿薄膜底部富铅、顶部富锡时, 载流子在空穴传输层界面区域的复合有所减少, 因而电池性能得到提升。
锡铅混合钙钛矿 太阳能电池 垂直组分梯度 溶剂工程 tin-lead mixed perovskite solar cell vertical component gradient solvent engineering 
无机材料学报
2023, 38(9): 1089
作者单位
摘要
1 中国科学院上海光学精密机械研究所超强激光科学与技术重点实验室,上海 201800
2 中国科学院上海光学精密机械研究所信息光学与光电技术实验室,上海 201800
3 中国科学院大学,北京 100049
4 中国科学院上海光学精密机械研究所精密光学工程部(筹),上海 201800
锡液滴发生器是激光等离子体型极紫外(LPP-EUV)光刻光源中最重要的核心部件之一。光刻光源要求锡液滴靶具备高重复频率、小直径且稳定性好的特性。综述了中国科学院上海光学精密机械研究所EUV光源团队近年来在液滴发生器方面的研究进展,包括液滴直径、重复频率、间距、位置和稳定性等。现阶段研制的锡液滴发生器,在100 kHz频率下喷射的锡液滴直径约为40 μm,间距约为230 μm,工作时长接近5 h。锡液滴在10 s短时间内,竖直和水平方向的位置不稳定性分别约为2 μm和1 μm。未来锡液滴的可用性性能(如液滴直径、工作时长和长时间的位置稳定性)还需进一步提升。
极紫外 光刻光源 液滴发生器 锡液滴 
激光与光电子学进展
2023, 60(23): 2314001
作者单位
摘要
1 燕山大学材料科学与工程学院亚稳材料制备技术与科学国家重点实验室, 秦皇岛 066004
2 唐山学院新材料与化学工程学院, 唐山 066000
本文采用湿法刻蚀法将单层石墨烯(G)与掺氟二氧化锡(FTO)薄膜复合在一起, 采用拉曼(Raman)光谱、聚焦离子束(FIB)和透射电子显微镜(TEM)研究了G/FTO双层薄膜的结构、表面和界面形貌、元素分布等信息; 采用基于原子力显微镜(AFM)的开尔文探针力显微镜(KPFM)和导电原子力显微镜(C-AFM)研究了FTO薄膜和G/FTO双层薄膜的形貌、接触电势差(CPD)、功函数、接触势垒。结果表明, FTO薄膜和G/FTO双层薄膜的接触电势差分别为-0.474、-0.441 V, 两者功函数分别为5.329、5.296 eV。与FTO薄膜相比, G/FTO双层薄膜的迁移率由21.26 cm2·V-1·s-1增加到23.82 cm2·V-1·s-1。FTO薄膜和G/FTO双层薄膜相应的势垒高度分别(0.39±0.06) V和(0.33±0.05) V, G/FTO双层薄膜的势垒高度更小。
石墨烯 掺氟二氧化锡 双层结构 接触特性 接触电势差 功函数 接触势垒 graphene fluorine doped tin dioxide bilayer structure contact characteristic contact potential difference work function contact barrier 
硅酸盐通报
2023, 42(6): 2262
Author Affiliations
Abstract
1 College of Electronic and Information Engineering, Shenzhen University, Shenzhen 518060, China
2 Institute of Microscale Optoelectronics (IMO), Shenzhen University, Shenzhen 518060, China
3 State Key Laboratory of Advanced Displays and Optoelectronics Technologies, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong, China
Indium-tin-zinc oxide (ITZO) thin-film transistor (TFT) technology holds promise for achieving high mobility and offers significant opportunities for commercialization. This paper provides a review of progress made in improving the mobility of ITZO TFTs. This paper begins by describing the development and current status of metal-oxide TFTs, and then goes on to explain the advantages of selecting ITZO as the TFT channel layer. The evaluation criteria for TFTs are subsequently introduced, and the reasons and significance of enhancing mobility are clarified. This paper then explores the development of high-mobility ITZO TFTs from five perspectives: active layer optimization, gate dielectric optimization, electrode optimization, interface optimization, and device structure optimization. Finally, a summary and outlook of the research field are presented.
thin-film transistor (TFT) indium-tin-zinc oxide (ITZO) TFT mobility active matrix (AM) displays 
Journal of Semiconductors
2023, 44(9): 091602
孟文利 1,2,*张育民 2,3,4孙远航 2王建峰 2,3,4徐科 1,2,3,4
作者单位
摘要
1 中国科学技术大学国家示范性微电子学院,合肥 230026
2 中国科学院苏州纳米技术与纳米仿生研究所,苏州 215123
3 苏州纳维科技股份有限公司,苏州 215123
4 江苏第三代半导体研究院,苏州 215000
透明半导体铟锡氧化物(ITO)作为电极能够降低光导开关电极边缘电流集聚效应和提高脉冲激光的利用率。本文通过在ITO与GaN界面之间分别插入10 nm的Ti与TiN, 研究Ti、TiN对ITO与GaN欧姆接触性能的影响。I-V测试结果表明, 随着退火温度升高, 插入TiN的光导开关一直保持欧姆接触特性, 而插入Ti的光导开关由欧姆接触转变为肖特基接触。通过TEM测试发现, 当以Ti作为插入层时, ITO通过插入层向插入层与GaN的界面扩散, 在接触界面形成Ti的氧化物及空洞。透射光谱显示, 不同退火温度下插入Ti层的透过率均低于38.3%, 而以TiN作为插入层时透过率为38.8%~55.0%。因此含有TiN的光导开关具有更稳定的电学性能和更高的透过率, 这为GaN光导开关在高温高功率领域的应用提供了参考。
GaN光导开关 欧姆接触 GaN photoconductive semiconductor switch ITO ITO Ti Ti TiN TiN Ohmic contact 
人工晶体学报
2023, 52(9): 1609
作者单位
摘要
太原理工大学电子信息与光学工程学院,山西 太原 030024
采用两步气相沉积方法制备高品质锡基卤化物钙钛矿纳米片。首先,在云母衬底上制备出尺寸可控的碘化亚锡(SnI2)纳米片前驱体;然后,将这些纳米片转化为甲胺锡碘(CH3NH3SnI3)。根据晶体成核生长理论,系统研究了沉积时间、H2气体流量、转化时间、Ar气体流量等条件对纳米片尺寸及成分的影响规律,并实现了尺寸可控且表面颜色均匀的无铅钙钛矿纳米片制备,其中尺寸可控制在8~41 μm。光致发光(PL)光谱测试结果证明所制备的CH3NH3SnI3纳米片具有良好的近红外(920 nm)发光特性。此外,经过聚甲基丙烯酸甲酯(PMMA)钝化的CH3NH3SnI3纳米片具有良好的稳定性,在N2氛围中可维持48 h以上的稳定性。这种尺寸可控的无铅钙钛矿纳米材料可应用到近红外光电器件中。
光学器件 锡基卤化物钙钛矿 气相沉积 晶体成核理论 纳米片 近红外特性 
光学学报
2023, 43(16): 1623022
代小爽 1,2,3王双 1,2,3,*谭珂 1,2,3霍彤 1,2,3[ ... ]刘铁根 1,2,3
作者单位
摘要
1 天津大学精密仪器与光电子工程学院,天津 300072
2 天津大学光电信息技术教育部重点实验室,天津 300072
3 天津大学光纤传感研究所,天津 300072
以多模光纤为基底来实现损失模式共振(LMR)折射率传感的灵敏度较低,在利用铟锡氧化物(ITO;In2O3和SnO2的质量分数分别为90%和10%)激发光纤LMR传感的基础上,在ITO薄膜上静电组装二氧化钛(TiO2)纳米粒子,实现折射率灵敏度的提升。使用Kretschman结构模型对传感器进行理论分析,仿真分析了LMR共振阶数与ITO薄膜厚度的关系,以及ITO作为LMR膜层实现折射率传感的可行性。通过在光纤侧壁磁控溅射ITO薄膜以产生LMR效应,制备ITO-LMR折射率传感器。通过折射率传感实验对ITO-LMR和TiO2-ITO-LMR两种传感器进行性能测试,在1.3333~1.3840的折射率变化范围内,TiO2-ITO-LMR传感器灵敏度可达1651.659 nm/RIU,相较于ITO-LMR折射率传感器,其灵敏度提升了3.058倍。
光纤光学 损失模式共振 折射率传感器 铟锡氧化物 二氧化钛纳米粒子 
光学学报
2023, 43(10): 1006003
作者单位
摘要
1 贵州民族大学 化学工程学院, 贵阳 550025
2 贵州民族大学 材料科学与工程学院, 贵阳 550025
3 中国振华集团永光电子有限公司, 贵阳 550018
以锌锡氧化物(ZTO)薄膜作为沟道层, 聚甲基丙烯酸甲酯(PMMA)薄膜作为介质层低温(100℃)制备了顶栅共面结构的薄膜晶体管(TFT), 并研究了ZTO沟道层成膜过程中氧分压对器件性能的影响。结果表明, ZTO沟道层具有稳定的非晶结构、较高的可见光透明性(在400~700nm范围内平均透过率大于等于89.61%), 且增大氧分压有利于其可见光透明性的提升。霍尔测试结果表明, 增大氧分压(由3.5×10-2Pa增大到7.5×10-2Pa)会降低ZTO电子载流子浓度(由4.73×1015cm-3降低到6.11×1012cm-3), 致使基于ZTO沟道层TFT器件的能耗降低(表现为关态电流的降低和耗尽型器件阈值电压的正向移动)。此外, 增大氧分压还有益于沟道层/介质层界面状态的优化, 即亚阈值摆幅减小。
薄膜晶体管 锌锡氧化物 氧分压 顶栅结构 低温 thin-film transistors zinc-tin-oxide oxygen partial pressure top-gate configuration low temperature 
半导体光电
2023, 44(1): 92
Author Affiliations
Abstract
1 Laboratory of Materials and Structure of Electromechanical Systems and their Reliability, Oum El Bouaghi University, Algeria
2 Faculty of Exact Sciences and Natural and Life Sciences, Oum El Bouaghi University, Algeria
3 Electrical Engineering Department, Oum El Bouaghi University, Algeria
4 Laboratory of Active Components and Materials, Oum El Bouaghi University, Algeria
Transparent conducting aluminum doped tin oxide thin films were prepared by sol-gel dip coating method with different Al concentrations and characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), UV–Vis spectrophotometry and photoconductivity study. The variation observed in the properties of the measured films agrees with a difference in the film's thickness, which decreases when Al concentration augments. X-ray diffraction analysis reveals that all films are polycrystalline with tetragonal structure, (110) plane being the strongest diffraction peak. The crystallite size calculated by the Debye Scherrer’s formula decreases from 11.92 to 8.54 nm when Al concentration increases from 0 to 5 wt.%. AFM images showed grains uniformly distributed in the deposited films. An average transmittance greater than 80% was measured for the films and an energy gap value of about 3.9 eV was deduced from the optical analysis. Finally, the photosensitivity properties like current–voltage characteristics,ION/IOFF ratio, growth and decay time are studied and reported. Also, we have calculated the trap depth energy using the decay portion of the rise and decay curve photocurrent.Transparent conducting aluminum doped tin oxide thin films were prepared by sol-gel dip coating method with different Al concentrations and characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), UV–Vis spectrophotometry and photoconductivity study. The variation observed in the properties of the measured films agrees with a difference in the film's thickness, which decreases when Al concentration augments. X-ray diffraction analysis reveals that all films are polycrystalline with tetragonal structure, (110) plane being the strongest diffraction peak. The crystallite size calculated by the Debye Scherrer’s formula decreases from 11.92 to 8.54 nm when Al concentration increases from 0 to 5 wt.%. AFM images showed grains uniformly distributed in the deposited films. An average transmittance greater than 80% was measured for the films and an energy gap value of about 3.9 eV was deduced from the optical analysis. Finally, the photosensitivity properties like current–voltage characteristics,ION/IOFF ratio, growth and decay time are studied and reported. Also, we have calculated the trap depth energy using the decay portion of the rise and decay curve photocurrent.
tin oxide thin films sol-gel UV photodetector photoconductivity trap depth 
Journal of Semiconductors
2023, 44(3): 032801

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