设计并制作了一款直径为1.1 mm、频率为31.11 kHz的MEMS压电微镜，用于需要高速扫描且小尺寸的应用场景。该器件所需模态为扭转模态，与其他模态分离情况好，不会出现耦合。实验结果显示，电压为32 V时光学扫描角40.66°，品质因子1 155。改变PZT极性，实验得到了薄膜材料的铁电性质影响。另外，完成了MEMS微镜在0 ℃~100 ℃不同温度下角度的变化实验，偏离不超过±1°。仿真模拟、实验结果和理论计算结果三者拟合情况好，表明该设计的微镜具有较高的可控性和稳定性，为实现高精度扫描提供了有力支持。该MEMS压电微镜在AR/VR等领域中具有潜在的应用前景。

The emission wavelength of InGaN/GaN dot-in-wire LED can be tuned by modifying the nanowire diameter, but it causes mismatched angular distributions between blue, green, and red nanowires because of the excitation of different waveguide modes. Besides, the far-field radiation patterns and light extraction efficiency are typically calculated by center dipoles, which fails to provide accurate results. To address these issues, we first compare the simulation results between central dipole and dipole cloud with experimental data. Next, we calculate and analyze the display metrics for full-color nanowire LEDs by 3D dipole cloud. Finally, we achieve unnoticeable angular color shift within ±20° viewing cone for augmented reality (AR) and virtual reality (VR) displays with an improved light extraction efficiency.The emission wavelength of InGaN/GaN dot-in-wire LED can be tuned by modifying the nanowire diameter, but it causes mismatched angular distributions between blue, green, and red nanowires because of the excitation of different waveguide modes. Besides, the far-field radiation patterns and light extraction efficiency are typically calculated by center dipoles, which fails to provide accurate results. To address these issues, we first compare the simulation results between central dipole and dipole cloud with experimental data. Next, we calculate and analyze the display metrics for full-color nanowire LEDs by 3D dipole cloud. Finally, we achieve unnoticeable angular color shift within ±20° viewing cone for augmented reality (AR) and virtual reality (VR) displays with an improved light extraction efficiency.