Author Affiliations
Abstract
1 East China Normal University, School of Physics and Electronic Science, State Key Laboratory of Precision Spectroscopy, Shanghai, China
2 Nanjing University, College of Engineering and Applied Sciences, National Laboratory of Solid State Microstructures, Nanjing, China
3 China Jiliang University, College of Optical and Electronic Technology, Hangzhou, China
4 Shanxi University, Collaborative Innovation Center of Extreme Optics, Taiyuan, China
5 Chinese Academy of Sciences (CAS), Shanghai Institute of Optics and Fine Mechanics (SIOM), State Key Laboratory of High Field Laser Physics and CAS Center for Excellence in Ultra-Intense Laser Science, Shanghai, China
Achieving spatiotemporal control of light at high speeds presents immense possibilities for various applications in communication, computation, metrology, and sensing. The integration of subwavelength metasurfaces and optical waveguides offers a promising approach to manipulate light across multiple degrees of freedom at high speed in compact photonic integrated circuit (PIC) devices. Here, we demonstrate a gigahertz-rate-switchable wavefront shaping by integrating metasurface, lithium niobate on insulator photonic waveguides, and electrodes within a PIC device. As proofs of concept, we showcase the generation of a focus beam with reconfigurable arbitrary polarizations, switchable focusing with lateral focal positions and focal length, orbital angular momentum light beams as well as Bessel beams. Our measurements indicate modulation speeds of up to the gigahertz rate. This integrated platform offers a versatile and efficient means of controlling the light field at high speed within a compact system, paving the way for potential applications in optical communication, computation, sensing, and imaging.
metasurface photonic integrated circuit lithium niobate on insulator high-speed modulation 
Advanced Photonics
2024, 6(1): 016005
作者单位
摘要
1 重庆邮电大学 光电工程学院, 重庆 400065
2 电子科技大学 重庆微电子产业技术研究院, 重庆 401332
3 电子科技大学 电子科学与工程学院, 四川 成都 611731
铌酸锂(LiNbO3, LN)是一种广泛使用的介电材料, 由于其电光系数大, 透明范围大, 本征带宽宽, 因而在集成和非线性光学器件中极为重要。但绝缘体上铌酸锂薄膜(LNOI)的化学稳定性好, 刻蚀速率慢, 其微结构参数难以控制。针对以上问题, 该文开展了基于电感耦合等离子体刻蚀(ICP-RIE)的LNOI脊形微结构的制备工艺研究, 分析了腔室压强、气体总流量及刻蚀功率等参数对刻蚀速率、刻蚀倾角和表面粗糙度(RMS)的影响。研究表明, 在优化的工艺条件下, LNOI薄膜的刻蚀速率达到24.9 nm/min, 制备出刻蚀深度249 nm、刻蚀倾角76°、表面粗糙度(RMS)0.716 nm的LNOI脊形微结构。该文通过对刻蚀工艺与微观结构参数的研究, 建立了基于ICP的LNOI微结构刻蚀方法, 为控制LNOI脊形光波导和提升性能提供了工艺支撑。
绝缘体上铌酸锂薄膜(LNOI) 集成光子学 脊形结构 电感耦合等离子体刻蚀 微结构参数 lithium niobate on insulator (LNOI) integrated photonics ridge structure inductively coupled plasma etching microstructural parameters 
压电与声光
2023, 45(2): 239
Author Affiliations
Abstract
1 School of Electronic and Electrical Engineering, Shanghai University of Engineering Science, Shanghai 201620, China
2 State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China
3 Shanghai Research Center for Quantum Sciences, Shanghai 201315, China
4 Collaborative Innovation Center of Light Manipulation and Applications, Shandong Normal University, Jinan 250358, China
Optical frequency conversion based on the second-order nonlinearity (χ(2)) only occurs in anisotropic media (or at interfaces) and thus is intrinsically polarization-dependent. But for practical applications, polarization-insensitive or independent operation is highly sought after. Here, by leveraging polarization coupling and second-order nonlinearity, we experimentally demonstrate a paradigm of TE/TM polarization-independent frequency upconversion, i.e., sum frequency generation, in the periodically poled lithium niobate-on-insulator ridge waveguide. The cascading of quasi-phase-matched polarization coupling and nonlinear frequency conversion is exploited. With a proper transverse electric field, TE and TM mode fundamental waves can be frequency-upconverted with an equal efficiency in the frequency converter. The proposed method may find ready application in all-optical wavelength conversion and upconversion detection technologies.
frequency upconversion polarization coupling lithium niobate on insulator ridge waveguide cascading process 
Chinese Optics Letters
2023, 21(12): 121901
作者单位
摘要
浙江大学光电科学与工程学院,浙江 杭州 310027
基于铌酸锂薄膜提出了一种新型的低损耗切趾光栅设计方案,在线性改变填充因子的同时根据布拉格条件对每个光栅周期进行调控。此方案不仅提高了向上衍射效率,还增加了向上衍射模斑和单模光纤模斑的重叠积分,极大地提高了耦合效率。1550 nm处对于TE模式耦合效率达到81.3%(0.90 dB),是目前已报道的基于无反射层铌酸锂薄膜的光栅耦合器设计方案中耦合效率最高的。考虑到实际工艺下波导存在刻蚀倾角,基于合理推广的布拉格条件同样对光栅周期进行调控,优化了带刻蚀倾角的切趾耦合光栅,耦合效率高达60.0%(2.22 dB)。
铌酸锂薄膜 低损耗 切趾光栅 布拉格条件 刻蚀倾角 
光学学报
2023, 43(19): 1913001
Author Affiliations
Abstract
National Laboratory of Solid State Microstructures, School of Electronic Science and Engineering, School of Physics, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
The microring resonator based on lithium niobate on insulator (LNOI) is a promising platform for broadband nonlinearity process because of its strong second-order nonlinear coefficients, the capability of dispersion engineering, etc. It is important to control the energy transmitted into the resonator at different wavelengths, as this becomes difficult for two bands across an octave. In this Letter, we study the effect of different pulley bus-resonator configurations on phase mismatching and mode field overlap. We achieve the control of energy transmission coefficients at different wavebands simultaneously and provide a general design methodology for coupled structures for broadband applications. This paper can contribute to quantum and classical optical broadband applications based on LNOI microring resonators.
lithium niobate on insulator broadband pulley bus waveguide coupled mode theory 
Chinese Optics Letters
2023, 21(5): 051301
作者单位
摘要
上海交通大学区域光纤通信网与新型光通信系统国家重点实验室,上海 200240
绝缘体上掺铒铌酸锂(Er∶LNOI)因其可以提供高增益而备受关注。对Er∶LNOI波导放大器完成了建模,并建立了对应的能级速率方程。利用该模型对Er∶LNOI波导的增益性能进行了仿真,并与实验进行了对比。当信号波长为1531.5 nm和1550.0 nm时,研究了放大器在980 nm和1484 nm泵浦波长下的净增益,并且通过实验和仿真比较了不同信号功率和泵浦功率下的波导增益。除此之外,还研究了波导长度对放大器增益的影响。
光学器件 波导 放大器 绝缘体上掺铒铌酸锂 净增益 
光学学报
2022, 42(13): 1323002
作者单位
摘要
1 北京理工大学光电学院信息光子技术工信部重点实验室,北京 100081
2 山东大学信息科学与工程学院,山东 济南 250100
环形谐振腔可用于高精度高灵敏度传感,将环形谐振腔与悬臂梁式压力传感器相结合,推导了该压力传感器的灵敏度的表达式,灵敏度会随着所施加压强的不同而变化,当施加的压强为1 kPa时,灵敏度为71.73 pm/kPa。采用低损耗的绝缘体上铌酸锂(LNOI)来设计环形谐振腔,极大地提高了压力传感器的Q值,可提高测得压力的精度。深入分析了临界耦合与非临界耦合、波导损耗、环形波导周长对Q值的影响,并借助Matlab对其进行了分析。结果表明:对Q值影响最大的是波导损耗;环形波导周长增加不会直接增大Q值,但会降低损耗,从而间接增大Q值。计算结果表明,当环形波导半径为80 μm,损耗为0.6322 m-1时,Q值高达5.7×106
环形谐振腔 绝缘体上铌酸锂 压力传感器 灵敏度 Q值 
激光与光电子学进展
2022, 59(3): 0323001
作者单位
摘要
南开大学 物理科学学院 泰达应用物理研究院弱光非线性光子学教育部重点实验室,天津 300457
绝缘体上铌酸锂薄膜凭借铌酸锂晶体优异的光学性能和薄膜器件的易加工和可集成特性,被视为理想的集成光学平台。除了波导、调制器等传输、控制器件方面的研究之外,最近铌酸锂薄膜激光器的研究也取得了显著的进展。文中将对最近迅速发展的铌酸锂薄膜微腔激光器的研究现状进行综述。首先,介绍铌酸锂晶体和铌酸锂薄膜稀土离子掺杂的主要技术方案,以及近期有关于稀土离子掺杂铌酸锂薄膜微纳光学器件制备方面的探索;其次,总结近年来掺铒铌酸锂薄膜微盘腔、微环腔激光器方面的研究进展;然后,阐述微腔激光器体系几种常见的实现单模激光器方法的工作机理,介绍研究者们利用“游标效应”调制模式损耗等方式实现掺铒铌酸锂薄膜单模激光器的研究进展;最后,基于目前报导的铌酸锂薄膜激光器研究成果,对目前研究存在的局限性以及未来的研究方向进行了探讨。
铌酸锂薄膜 微腔激光器 集成光学 lithium niobate on insulator microcavity laser integrated optics 
红外与激光工程
2021, 50(11): 20210546
Author Affiliations
Abstract
1 National Laboratory of Solid State Microstructures, School of Physics, School of Electronic Science and Engineering, College of Engineering and Applied Sciences, and Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China
2 State Key Laboratory of Optoelectronic Materials and Technologies and School of Physics and Engineering, Sun Yat-sen University, Guangzhou 510275, China
We study the effect of dimension variation for second-harmonic generation (SHG) in lithium niobate on insulator (LNOI) waveguides. Non-trivial SHG profiles in both type-0 and type-I quasi-phase matching are observed during the wavelength tuning of the fundamental light. Theoretical modeling shows that the SHG profile and efficiency can be greatly affected by the waveguide cross-section dimension variations, especially the thickness variations. In particular, our analysis shows that a thickness variation of tens of nanometers is in good agreement with the experimental results. Such investigations could be used to evaluate fabrication performance of LNOI-based nonlinear optical devices.
lithium niobate on insulator second-harmonic generation dimension variation 
Chinese Optics Letters
2021, 19(6): 060015
Author Affiliations
Abstract
1 MOE Key Laboratory of Weak-Light Nonlinear Photonics, TEDA Institute of Applied Physics and School of Physics, Nankai University, Tianjin 300457, China
2 Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, China
3 Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
Lithium niobate on insulator (LNOI), as an emerging and promising optical integration platform, faces shortages of on-chip active devices including lasers and amplifiers. Here, we report the fabrication of on-chip erbium-doped LNOI waveguide amplifiers based on electron beam lithography and inductively coupled plasma reactive ion etching. A net internal gain of ~30 dB/cm in the communication band was achieved in the fabricated waveguide amplifiers under the pump of a 974 nm continuous laser. This work develops new active devices on LNOI and may promote the development of LNOI integrated photonics.
lithium niobate lithium niobate on insulator amplifier integrated optics 
Chinese Optics Letters
2021, 19(6): 060008

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