在纳米激光直写加工系统中，显微物镜是其中的关键部件，行业发展的趋势是在大数值孔径（NA）下具有更大的物方视场，并且能适应双光子聚合（Two-photon polymerization，TPP）胶折射率的变化。对比当前TPP效应研究所用显微物镜的指标，挖掘了物方视场、NA和镜片数的关系，并提出物镜的合成敏感度指标（Synthetic sensitivity index，I_ss）。结合I_ss设计了一款波段为500~800 nm、NA大于1.3、物方视场为1.0 mm的显微物镜。该物镜的设计结果为，调制传递函数曲线接近衍射极限，波像差均方根小于0.07λ，以内调焦方式来适应TPP胶折射率的变化。公差分析表明该设计结果具有可行性。

为了提高TiO2在太阳光下的催化性能, 采用真空蒸镀法在金属钛表面蒸镀Ag膜, 并结合飞秒激光做一步加工, 同步实现了微纳结构TiO2的生成与Ag粒子的复合, 取得了具有良好太阳光催化性能的掺Ag的TiO2表面。结果表明, 经300min模拟太阳光辐照, 掺杂Ag的TiO2微纳复合材料对亚甲基蓝的降解率为70%, 是具有同样结构的TiO2材料的1.5倍;这种基于体材料直接加工的方法可以提高比表面积, 解决传统TiO2分散性高、难回收的问题;利用这种方法制备的结构化掺杂Ag的TiO2材料在模拟太阳光照下光催化性能得到显著提升。这一结果对制备环保高效的TiO2光催化剂具有重要的潜在应用价值, 并有望应用于工厂大规模快速生产。

为满足飞秒激光微纳加工系统对高加工精度和大加工范围的需求, 首先确定了该系统的重要组成部分-无限共轭距显微物镜所需具备的特性及设计指标。依据薄透镜组的初级像差理论, 针对飞秒激光波长推导出光学系统为校正匹兹凡场曲和二级光谱所需满足的条件。该镜头由11片球面透镜构成, 所选用材料皆为国产玻璃, 同时避免三胶合结构的使用。设计了一套工作波长为785~815 nm, 数值孔径为0.9, 像方视场为22.5 mm, 放大倍率为40×的近红外平场复消色差显微物镜。设计结果表明: 该镜头的MTF良好, 全视场波像差均小于0.08λ, 各种几何像差均远小于公差且满足平场和复消色差条件, 能量集中度高。使用补偿器放松材料公差、加工公差和装调公差, 公差分配后全视场RMS波像差小于0.09λ, 满足实际应用要求。

半导体激光器在生物技术、信息存储、光子医学诊疗等方面得到了广泛应用。随着纳米技术和纳米光子学的发展，紧凑微型化激光器应用前景引人关注。当激光器谐振腔尺寸减小到发射波长时，电磁谐振腔中将产生更为有趣的物理效应。因此，在发展低维、低泵浦阈值的超快相干光源，以及纳米光电集成和等离激元光路时，减小半导体激光器的三维尺寸至关重要。在本综述中，首先介绍了纳米等离子体激光器中的谐振腔模式增益和限制因子的总体理论，并综述了金属-绝缘材料-半导体纳米(MIS)结构或其它相关金属覆盖半导体结构的纳米等离子体激光器各方面的总体研究进展。特别地，对基于MIS结构的等离子体谐振腔实现纳米等离子体激光器三维衍射极限的突破，进行了详细的介绍。本文也介绍并展望了纳米等离子体激光器的技术挑战和发展趋势，为纳米激光器进一步研究提供参考。

介绍了碳纳米管(CNTs)/聚合物复合材料分散性、定向排布和组装方面的研究进展, 并利用双光子聚合(TPP)激光直写技术, 实现了多壁碳纳米管(MWNTs)在三维空间的定向排布和分子组装。通过加入硫醇分子, 提升了MWNTs/聚合物复合材料中CNTs的分散性和掺杂浓度, 增强了CNTs/聚合物复合材料在电学、光学、力学方面的性能, 并成功实现了三维CNTs功能器件的制造。研究结果表明, 通过将TPP激光直写技术与热退火工艺相结合, 可以实现对CNTs簇排列方向和位置的精确控制。

Advanced micro/nanofabrication of functional materials and structures with various dimensions represents a key research topic in modern nanoscience and technology and becomes critically important for numerous emerging technologies such as nanoelectronics, nanophotonics and micro/nanoelectromechanical systems. This review systematically explores the non-conventional material processing approaches in fabricating nanomaterials and micro/nanostructures of various dimensions which are challenging to be fabricated via conventional approaches. Research efforts are focused on laser-based techniques for the growth and fabrication of one-dimensional (1D), two-dimensional (2D) and three-dimensional (3D) nanomaterials and micro/nanostructures. The following research topics are covered, including: 1) laser-assisted chemical vapor deposition (CVD) for highly efficient growth and integration of 1D nanomaterial of carbon nanotubes (CNTs), 2) laser direct writing (LDW) of graphene ribbons under ambient conditions, and 3) LDW of 3D micro/nanostructures via additive and subtractive processes. Comparing with the conventional fabrication methods, the laser-based methods exhibit several unique advantages in the micro/nanofabrication of advanced functional materials and structures. For the 1D CNT growth, the laser-assisted CVD process can realize both rapid material synthesis and tight control of growth location and orientation of CNTs due to the highly intense energy delivery and laser-induced optical near-field effects. For the 2D graphene synthesis and patterning, roomtemperature and open-air fabrication of large-scale graphene patterns on dielectric surface has been successfully realized by a LDW process. For the 3D micro/nanofabrication, the combination of additive two-photon polymerization (TPP) and subtractive multi-photon ablation (MPA) processes enables the fabrication of arbitrary complex 3D micro/nanostructures which are challenging for conventional fabrication methods. Considering the numerous unique advantages of laser-based techniques, the laserbased micro/nanofabrication is expected to play a more and more important role in the fabrication of advanced functional micro/nano-devices.