Author Affiliations
Abstract
1 Saint-Petersburg Electrotechnical University "LETI", Saint Petersburg, 197022, Russian Federation
2 Alferov Saint-Petersburg National Research Academic University of the Russian Academy of Sciences, Saint Petersburg, 194021, Russian Federation
3 Saint Petersburg Polytechnic University of Peter the Great, Saint Petersburg, 195251, Russian Federation
4 Shubnikov Institute of Crystallography of Federal Scientific Research Centre “Crystallography and Photonics”, Russian Academy of Sciences, Moscow, 119333, Russian Federation
5 National Research Center ‘Kurchatov Institute’, Moscow, 123182, Russian Federation
6 University associated with IA EAEC, Saint Petersburg, 194044, Russian Federation
7 Institute for Analytical Instrumentation, Saint Petersburg, 198095, Russian Federation
8 Ioffe Institute, Saint Petersburg, 194021, Russian Federation
A new theoretical method to study super-multiperiod superlattices has been developed. The method combines the precision of the 8-band kp-method with the flexibility of the shooting method and the Monte Carlo approach. This method was applied to examine the finest quality samples of super-multiperiod Al0.3Ga0.7As/GaAs superlattices grown by molecular beam epitaxy. The express photoreflectance spectroscopy method was utilized to validate the proposed theoretical method. For the first time, the accurate theoretical analysis of the energy band diagram of super-multiperiod superlattices with experimental verification has been conducted. The proposed approach highly accurately determines transition peak positions and enables the calculation of the energy band diagram, transition energies, relaxation rates, and gain estimation. It has achieved a remarkably low 5% error compared to the commonly used method, which typically results in a 25% error, and allowed to recover the superlattice parameters. The retrieved intrinsic parameters of the samples aligned with XRD data and growth parameters. The proposed method also accurately predicted the escape of the second energy level for quantum well thicknesses less than 5 nm, as was observed in photoreflectance experiments. The new designs of THz light-emitting devices operating at room temperature were suggested by the developed method.
super-multiperiod superlattice photoreflectance spectroscopy Kane model kp-method energy band diagram light amplifiers 
Journal of Semiconductors
2024, 45(2): 022701
Peng Cao 1,2Tiancai Wang 1,3Hongling Peng 1,4Zhanguo Li 5[ ... ]Wanhua Zheng 1,2,3,4,*
Author Affiliations
Abstract
1 Laboratory of Solid-State Optoelectronics Information Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 College of Electronic and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
4 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
5 School of Physics, Changchun Normal University, Changchun 130022, China
6 Physics Department, Lancaster University, Lancaster LA1 4YB, UK
In this paper, we demonstrate nBn InAs/InAsSb type II superlattice (T2SL) photodetectors with AlAsSb as the barrier that targets mid-wavelength infrared (MWIR) detection. To improve operating temperature and suppress dark current, a specific Sb soaking technique was employed to improve the interface abruptness of the superlattice with device passivation using a SiO2 layer. These result in ultralow dark current density of 6.28×10-6 A/cm2 and 0.31 A/cm2 under -600 mV at 97 K and 297 K, respectively, which is lower than most reported InAs/InAsSb-based MWIR photodetectors. Corresponding resistance area product values of 3.20×104 Ω ·cm2 and 1.32 Ω ·cm2 were obtained at 97 K and 297 K. A peak responsivity of 0.39 A/W with a cutoff wavelength around 5.5 µm and a peak detectivity of 2.1×109 cm·Hz1/2/W were obtained at a high operating temperature up to 237 K.
mid-wavelength infrared photodetector InAs/InAsSb superlattice high operating temperature dark current 
Chinese Optics Letters
2024, 22(1): 012502
何苗 1,2周易 1,2,3,*应翔霄 2梁钊铭 2[ ... ]陈建新 2,3
作者单位
摘要
1 上海理工大学,上海 200433
2 中国科学院上海技术物理研究所,上海 200083
3 国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024
II类超晶格红外探测器一般通过台面结实现对红外辐射的探测,而通过离子注入实现横向PN结,一方面材料外延工艺简单,同时可以利用超晶格材料横向扩散长度远高于纵向的优势改善光生载流子的输运,且易于制作高密度平面型阵列。本文利用多种材料表征技术,研究了不同能量的Si离子注入以及退火前后对InAs/GaSb II类超晶格材料性能的影响。研究通过Si离子注入,外延材料由P型变为N型,超晶格材料中产生了垂直方向的拉伸应变,晶格常数变大,且失配度随着注入能量的增大而增大,注入前失配度为-0.012%,当注入能量到200 keV时,失配度达到0.072%,超晶格部分弛豫,弛豫程度为14%,而在300 °C 60 s退火后,超晶格恢复完全应变状态,且晶格常数变小,这种张应变是退火引起的Ga-In相互扩散以及Si替位导致的晶格收缩而造成的。
InAs/GaSb II类超晶格 离子注入 平面结 退火 HRXRD InAs/GaSb Type II superlattice ion implantation planar junction annealing HRXRD 
红外与毫米波学报
2024, 43(1): 15
作者单位
摘要
1 中国科学院上海微系统与信息研究所太赫兹固态技术重点实验室, 上海 200050
2 中国科学院大学材料科学与光电工程中心, 北京 100049
3 江苏大学物理与电子工程学院, 江苏镇江 212013
提出一种基于电场驱动的 GaAs基微带超晶格高阶谐波产生的太赫兹倍频器, 利用平衡方程方法分析了倍频器在磁场下峰值功率输出和在参数空间(Edc,Eac)的分布情况。研究表明, 在 (Edc,Eac)的参数平面内, 磁场对二次和三次谐波功率的峰值影响不大, 但磁场会拓宽谐波输出功率的峰值区域, 提高在 (Edc,Eac)参数空间内输出峰值功率的概率。当 Eac确定时, 谐波发射功率峰值的位置会受到直流电场产生的布洛赫振荡频率 fB、交流电场产生的调制布洛赫振荡频率 fMB和磁场引起的回旋振荡频率 fc的影响而发生变化。研究表明, 基于半导体超晶格的太赫兹倍频器是很有应用潜力的太赫兹波发生器件。
超晶格 太赫兹 谐波 倍频器 semiconductor superlattice terahertz harmonics frequency multiplier 
太赫兹科学与电子信息学报
2023, 21(4): 517
作者单位
摘要
中国电子科技集团有限公司第十一研究所,北京100015
针对InAs/GaSb II类超晶格红外探测器开发高质量背减薄工艺,获得了高质量衬底表面,改善了超晶格红外探测器组件的成像品质。采用机械抛光和机械化学抛光相结合的工艺减薄衬底,其中机械抛光削减衬底大部分厚度,然后通过机械化学抛光去除机械损伤。机械化学抛光过程中,在压力、转速等不变的情况下,主要研究机械化学抛光液的pH值对衬底表面质量的影响。实验结果表明,当机械化学抛光液的pH值为94时,获得了高质量、低损伤的芯片衬底表面,并实现了最佳的探测器组件成像效果。
InAs/GaSb II类超晶格 红外探测器 背减薄 pH值 InSb/GaSb type-II superlattice infrared detector back thinning pH value 
红外
2023, 44(10): 0015
作者单位
摘要
1 
2 中国科学院半导体研究所,北京100083
分别采用干法刻蚀工艺路线和湿法腐蚀工艺路线制备了面阵规模为320×256、像元中心距为30 m的InAs/GaSb Ⅱ类超晶格长/长波双色红外焦平面器件,并对其台面形貌、接触孔形貌、伏安特性以及互连读出电路并封入杜瓦后的中测性能进行了对比研究。总结了采用干法工艺和湿法工艺制备双色InAs/GaSb Ⅱ类超晶格焦平面器件的特点。该研究对InAs/GaSb Ⅱ类超晶格焦平面器件的研制具有参考意义。
Ⅱ类超晶格 焦平面 双色 InAs/GaSb type-II superlattice focal plane array dual-color0 
红外
2023, 44(4): 0001
白雪莉 1,2柴旭良 1,3周易 1,3,*朱艺红 1[ ... ]陈建新 1,2,3,**
作者单位
摘要
1 中国科学院上海技术物理研究所 红外成像材料与器件重点实验室,上海 200083
2 上海科技大学 信息科学与技术学院,上海 201210
3 国科大杭州高等研究院 物理与光电工程学院,浙江 杭州 310024
带间级联红外探测器可以利用多级吸收区级联的方式实现高的工作温度,但不同的吸收区厚度设计方式会使得器件在不同级数吸收区中出现光生载流子的不匹配现象,从而对器件量子效率造成影响。为更好地理解带间级联探测器的级数和吸收区厚度对量子效率的影响,对基于InAs/GaSb II类超晶格的带间级联探测器进行了变温测试,并基于多级光电流的“平均效应”建立了工作在反向偏置电压的量子效率计算模型,通过与实际测试的量子效率对比,发现在低温条件下实验数据和计算结果拟合一致性较好,验证了多级带间级联探测器中基于内增益机制的光电流平均效应。但在高温条件下,实际的光电流低于“平均效应”的理论计算结果,这可能是由于高温下少数载流子寿命变短,在吸收区和弛豫区界面处存在光生载流子的复合机制。
InAs/GaSb II类超晶格 带间级联探测器 电子增益 量子效率 type-II InAs/GaSb superlattice interband cascade infrared photodetector electrical gain quantum efficiency 
红外与毫米波学报
2023, 42(6): 716
作者单位
摘要
1 中国传媒大学 信息与通信工程学院,北京 100024
2 中国传媒大学 数据科学与智能媒体学院,北京 100024
非线性频率转换是非线性光学中的重点研究内容之一,本文将Gosper分形与Z分形两种超晶格结构引入非线性光子晶体中,理论分析了两种超晶格结构经过准相位匹配进行非线性频率转换的谐波特点。Gosper分形超晶格的倒空间结构整体旋转60°后,依然能够和原图形重合;在准相位匹配的条件下,能够在六个不同方向实现相同的倍频波长输出;在级联三倍频中,实现了波长为711.3 nm、554.7 nm、491 nm的三倍频输出,并理论计算了其偏离角度。在二维Z分形的傅里叶空间中,充分利用了高阶横向倒格矢,能够实现基波波长范围为1.402 μm~1.430 μm的二次谐波频率转换,其中波长间距最小仅有1 nm。最后,为三维Z分形超晶格结构晶体的制备提供了数据支持。
非线性光学 频率转换 准相位匹配 分形超晶格结构 倒易矢量 Nonlinear optics Frequency conversion Quasi-phase matched Fractal superlattice structure Reciprocal vector 
光子学报
2023, 52(11): 1126002
Ke Jiang 1,2†Simeng Liang 3†Xiaojuan Sun 1,2,*Jianwei Ben 1,2[ ... ]Ke Xu 3,4,***
Author Affiliations
Abstract
1 State Key Laboratory of Luminescence and Applications, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 State Key Laboratory of Virology, College of Life Sciences, Wuhan University, Wuhan 430072, China
4 Institute for Vaccine Research, Animal Biosafety Level 3 Laboratory, Wuhan University, Wuhan 430072, China
Efficient and eco-friendly disinfection of air-borne human respiratory RNA viruses is pursued in both public environment and portable usage. The AlGaN-based deep ultraviolet (DUV) light-emission diode (LED) has high practical potentials because of its advantages of variable wavelength, rapid sterilization, environmental protection, and miniaturization. Therefore, whether the emission wavelength has effects on the disinfection as well as whether the device is feasible to sterilize various respiratory RNA viruses under portable conditions is crucial. Here, we fabricate AlGaN-based DUV LEDs with different wavelength on high-temperature-annealed (HTA) AlN/Sapphire templates and investigate the inactivation effects for several respiratory RNA viruses. The AlN/AlGaN superlattices are employed between the template and upper n-AlGaN to release the strong compressive stress (SCS), improving the crystal quality and interface roughness. DUV LEDs with the wavelength of 256, 265, and 278 nm, corresponding to the light output power of 6.8, 9.6, and 12.5 mW, are realized, among which the 256 nm-LED shows the most potent inactivation effect in human respiratory RNA viruses, including SARS-CoV-2, influenza A virus (IAV), and human parainfluenza virus (HPIV), at a similar light power density (LPD) of ~0.8 mW/cm2 for 10 s. These results will contribute to the advanced DUV LED application of disinfecting viruses with high potency and broad spectrum in a portable and eco-friendly use.
AlGaN DUV LED superlattice SARS-CoV-2 influenza A virus 
Opto-Electronic Advances
2023, 6(9): 230004
刘文婧 1,2祝连庆 1,2张东亮 1,2,*郑显通 1,2[ ... ]刘铭 3
作者单位
摘要
1 北京信息科技大学 光电信息与仪器北京市工程研究中心,北京 100016
2 北京信息科技大学 仪器科学与光电工程学院,北京 100016
3 华北光电技术研究所,北京 100015
双波段红外探测可对复杂的红外背景进行抑制,在军用目标识别、医疗诊断和污染监测等方面有重要应用价值。基于二类超晶格的双波段红外探测器在成本和性能方面具有很大的优势,成为新型红外探测器领域的研究热点。然而其暗电流和串扰会极大地影响双波段红外探测器的性能。因此,设计了nBn结构的InAs/GaSb超晶格中/长波双波段红外探测器,通过仿真比较不同结构的器件在不同偏压下的中波/长波通道的响应率和暗电流大小,分析势垒层厚度、吸收层厚度、不同区域的掺杂对暗电流和串扰的影响,从而得到最佳的模型参数达到减小暗电流和降低串扰的效果。仿真结果显示:nBn结构的中/长波双波段红外探测器在77 K下,中波通道的暗电流密度为4.5×10−5 A·cm−2,在0.3 V偏压下,2 µm处的峰值量子效率为64%,探测率可以达到3.9×1011 cm·Hz1/2·W−1;长波通道的暗电流密度为1.3×10−4 A·cm−2,在−0.3 V的偏压下,5.6 µm处的峰值量子效率为48%,探测率可以达到4.1×1011 cm·Hz1/2·W−1。相关结论可为器件设计和加工提供参考。
红外探测器 双波段 nBn InAs/GaSb超晶格 暗电流 infrared detector dual-band nBn InAs/GaSb superlattice dark current 
红外与激光工程
2023, 52(9): 20220837

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