利用飞秒激光双光束干涉技术，结合柱透镜线扫描技术，在30 s内制备了面积为10 mm×10 mm的微米-纳米复合结构，极大地提升了激光加工效率。飞秒激光刻蚀后的硅表面包含双光束干涉引起的长周期微米结构，以及飞秒激光诱导的纳米周期结构。微米-纳米复合结构极大地提升了表面粗糙度，在毛细效应的作用下，硅在空气中显示出超亲水性，接触角从40°降为0°。测量烧蚀前后硅表面的X射线光电子能谱，发现激光加工后硅表面的Si-OH和H₂O分子的含量分别增加22.3%和13.6%，这进一步增强了硅表面的亲水性。随着激光照射功率的增加以及扫描速度的下降，硅表面接触角逐步下降。本文研究为高效制备大面积超亲水结构提供了新方法，在热传导、生物芯片等领域具有潜在的应用价值。

Inhomogeneity and low efficiency are two important factors that hinder the wide application of laser-induced periodic surface structures. Two-beam interference is commonly used to fabricate gratings with interference periods. This study reports regular and uniform periodic ripples fabricated efficiently by the interference of two femtosecond laser beams via a cylindrical lens. The interference period is adjusted to be an integer multiple of the wavelength of a surface plasmon polariton. Regular and uniform subwavelength nanogratings (RUSNGs) on a silicon wafer of a diameter of 100 mm are fabricated with a scanning velocity of 6–9 mm/s. Bright and pure colors (including purple, blue, and red) are demonstrated on different patterns covered with RUSNGs.