同济大学物理系精密光学工程技术研究所先进微结构材料教育部重点实验室, 上海 200092
基于多层膜技术的劳厄(Laue)透镜能实现硬X射线纳米级聚焦，在X射线微纳分析领域具有重要的应用前景。基于衍射动力学理论，分析了X射线在多层膜劳厄透镜中的传播，计算了不同结构的多层膜劳厄透镜对8 keV X射线的聚焦性能。结果表明，最外层厚度为5 nm的倾斜多层膜劳厄透镜可获得5.7 nm的聚焦光斑和26％的平均衍射效率。
X射线光学 多层膜劳厄透镜 衍射动力学 波带片 分辨率
Author Affiliations
Abstract
Institute of Precision Optical Engineering, Physics Department, Tongji University, Shanghai 200092, China
A multilayer Laue lens with a 15-nm outermost zone width is designed for an incident X-ray beam with an energy of 8 keV. WSi2/Si multilayer Laue lens with 324 layers and a total thickness of 7.9 \mu m is successfully fabricated using direct current magnetron sputtering method. After deposition, the multilayer is sliced and polished to achieve the ideal aspect ratio. Characterization results show that the multilayer structure is kept intact and the surface roughness is approximately 0.9 nm after slicing and repeated polishing.
多层膜劳厄透镜 X射线聚焦 磁控溅射 切片 抛光 340.0340 X-ray optics 310.1860 Deposition and fabrication 340.7440 X-ray imaging Chinese Optics Letters
2010, 8(s1): 174
