采用微机械表面加工技术,成功设计并研制出具有GaAs基微光机电系统(MOEMS)悬臂梁结构的可调谐微腔发光二极管。对其工作特性进行了分析,测量得到悬臂梁载荷-位移关系曲线,并对微光机电系统悬臂梁可调谐微腔发光二极管进行调谐光谱测量。实验结果表明,在直流电流40 mA,调谐电压范围4～22 V时,波长从974.5 nm蓝移至956.9 nm,室温下波长调谐最大达到17.6 nm。在实验基础上,采用有限元方法对具有分布布拉格反射镜(DBR)结构的悬臂梁动力学特性进行了研究,模拟结果与实验结果吻合较好。当悬臂梁长度为400 μm时,最大位移达到411 nm,最大调谐电压达到24 V。

An GaAs-based micro-opto-electro-mechanical system (MOEMS) cantilever tunable light emitting diode was presented. It is fabricated by standard surface micromachining technology. The relation of cantilever loading and displacement was measured, and the tunable spectrum of this cantilever tunable light emitting diode was also measured. When the current is 40 mA and applied voltage is from 4 V to 22 V, the wavelength is tuned from 974.5 nm to 956.9 nm and a wide tuning range of 17.6 nm was achieved under the room temperature. The optical and mechanical characters of the cantilever with distributed Bragg reflector (DBR) multiple layers in detail were studied by the finite element method. Further numerical simulations with MOEMS-cantilever show when the length of cantilever is 400 μm, the max-displacement of center of cantilever is 411 nm, and max-voltage is 24 V.