增强现实技术是元宇宙重要的人机交互平台，其中光学成像部件和微显示屏是成像质量的关键。目前有5种微显示器件：硅基液晶、硅基OLED、硅基micro LED、digital light processing（DLP）、激光扫描振镜。将着重介绍不同微显示屏的组成结构、工艺流程、硅基驱动方式、发展现状及面临的挑战。在硅基驱动部分，将从像素驱动的不同电路和不同驱动电路的优缺点入手，分析不同显示技术在硅基部分的设计和指标挑战。对目前不同技术所能达到的指标进行汇总比较。讨论硅基背板的设计关注点和发展趋势。最后，对不同微显示芯片的应用场景和发展进行讨论。

Augmented reality is an important human-machine interface platform for the metaverse, and optical imaging units and microdisplay screens in a system are the key to the display performance. At present, there are five popular microdisplay devices, namely, the liquid crystal on silicon, organic light-emitting diode (OLED) on silicon, micro light-emitting diode (micro LED) on silicon, digital light processing (DLP), and laser scanning galvanometer, all of which has their own special features. This study introduced the construction, manufacturing process, silicon driving circuit, status quo, and the challenges of different microdisplay screens. For the silicon-driving part, this study analyzed topics such as the pixel-driving circuit and its pros and cons and the challenges related to the design and index of different display technologies. Furthermore, the indicators that can be achieved by different technologies were also summarized and compared. The design focus and development trend of silicon-based backplanes were also discussed. Finally, the application scenarios and development of different microdisplay chips were discussed.