光电子技术, 2003, 23 (1): 41, 网络出版: 2006-06-08
CMP平坦化技术在LCoS显示器中的应用
Application of CMP Planarization in LCoS
摘要
作为一类新型LCD技术的LCoS显示屏是一种反射式液晶显示器,其镜面反射电极的平整性决定了整个显示器的亮度和对比度等主要显示参数.本文详细讨论了CMP技术在LCoS液晶显示器中实现平坦化的机理.
Abstract
LCoS panel as a kind of new LCD is a sort of liquid crystal display devices that operate in a reflective mode. And the planarization scale of the reflective mirror electrode is always modulating those key parameters of the microdisplay, such as lightness, contrast etc. In this paper, the principle on how to realize planarization in liquid crystal on silicon with CMP technology is discussed in detail.
代永平, 耿卫东, 孙钟林, 王隆望. CMP平坦化技术在LCoS显示器中的应用[J]. 光电子技术, 2003, 23(1): 41. 代永平, 耿卫东, 孙钟林, 王隆望. Application of CMP Planarization in LCoS[J]. Optoelectronic Technology, 2003, 23(1): 41.
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