报道了高精度激光光束参数(Μ2因子)测量系统的原理、结构和实验结果。该系统以数字化制冷面阵CCD为探测器,具有图像背景扣除、噪声确定、光斑能摄分布二维和三维显示、图像直方图、光束宽度、发散角、M2因子 等光束参数测量等功能, 已用于对多种灯抽运, LD抽运固体激光器光束参数的测量。此外, 还研制了可产生从 TEMo.jlj TEM35.。的多种光场分布的LD抽运固体激光横摸发生器,并对这些模式的M2因子进行了实验测量,测量值的理论值吻合。

This paper discussed the design, configuration and experiments of a high accuracy laser beam parameter (M2-factor) measurement system. The system utilizes a cooled digital CCD array as the detector and has the functions of background subtraction, noise determination, 2D and 3D energy distribution display, image histogram, beam width, divergence and M2-factor determinations. For testing the reliability of the above system a LD. pumped mode generator which can generate Hermite-Gaussian modes from TEM0.0 to TEM35.0 was developed. The M2-factor of different transverse modes were experimentally measured and the results agree with the theoretical estimation.