为实现机器人末端位姿多自由度实时测量反馈，融合一维光学位置传感器（Position Sensitive Detector，PSD）建立了平面3自由度非接触测量系统，对其测量原理，信号处理电路，环境光干扰去除和非线性标定算法等进行研究。根据PSD传感器测量特性和平面3自由度测量要求设计了4-PSD测量系统，并建立测量系统数学模型。研究了PSD传感器的信号处理电路，通过运放和除法器实现了单个PSD的信号处理，结合单片机与A/DC采样电路，实现了上位机的高频率信号采集。对4-PSD测量系统进行预实验，为消除环境光干扰，通过激光调制和数字滤波等方法进行验证。最后，通过激光位移传感器标定4-PSD测量系统，介绍了4-PSD的标定步骤（原点、转角、长度和二阶非线性标定），测定了系统标定后的误差分布。该测量系统具有较高的测量频率（50 Hz）。标定实验结果表明：标定后的4-PSD测量系统在70 mm×70 mm内，测量精度平均为0.49 mm，比标定前降低了90%的误差，能满足大部分高速、高精度机器人末端的非接触式实时测量反馈需求。

To achieve real⁃time, multi⁃degree⁃of⁃freedom measurement and feedback on the position and orientation of a robot's end⁃effector, a planar 3⁃DOF non⁃contact measurement system utilizing sensor fusion of a Position Sensitive Detector (PSD) was developed. The system's design involved studying the measurement principle, signal processing circuitry, ambient light interference mitigation, and a nonlinear calibration algorithm. Initially, a 4⁃PSD measurement system was tailored to the PSD sensor's measurement capabilities and the specific needs of planar 3⁃DOF measurement, establishing a mathematical model for the system. The PSD sensor's signal processing was then explored, achieving single PSD signal processing through an operational amplifier and divider, integrated with an MCU and A/D conversion chip for high⁃frequency signal acquisition on a PC. Preliminary tests of the 4⁃PSD system addressed ambient light interference using laser modulation and digital filtering techniques. Calibration of the 4⁃PSD system⁃comprising origin, angle, length, and second⁃order nonlinear calibration-was conducted using a laser displacement sensor, detailing the calibration steps and post⁃calibration error distribution. The designed system boasts a high measurement frequency of 50 Hz, with calibration experiments indicating an average accuracy of 0.49 mm within a 70 mm×70 mm range, achieving a 90% error reduction post⁃calibration. This system fulfills the majority of requirements for high⁃speed, high⁃precision, non⁃contact real⁃time measurement and feedback of robot end⁃effectors.