光学学报, 1997, 17 (4): 489, 网络出版: 2006-10-31
微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能研究
Optical Properties of SiNx Films Prepared by Microwave ECR-CVD
氮化硅薄膜 光学性能 微波电子回旋共振-化学气相沉积 SiNx film optical property microwave electron cyclotron resonance-chemical v
摘要
研究了微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能,这种SiNx薄膜具有透光谱宽、透光率高的特点,总结了透光谱、折射率、光隙能随微波功率、基片温度的变化关系。
Abstract
The optical properties of SiN x films prepared by microwave ECR CVD have been investigated.The wide transmission spectrum and high transmissivity of SiN x films are obtained. The effects of microwave power and substrate temperature on transmission spectra, refractive index, optical band gap are analysed.
叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. 微波电子回旋共振-化学气相沉积SiNx薄膜的光学性能研究[J]. 光学学报, 1997, 17(4): 489. 叶超, 宁兆元, 项苏留, 沈明荣, 汪浩, 甘肇强. Optical Properties of SiNx Films Prepared by Microwave ECR-CVD[J]. Acta Optica Sinica, 1997, 17(4): 489.
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