激光与光电子学进展, 2020, 57 (11): 111425, 网络出版: 2020-06-02
飞秒激光在单模光纤中精密加工微孔及其传感应用 下载: 942次
Femtosecond Laser Precision Machining of Micropores in Single-Mode Fiber and Sensing Application
激光光学 飞秒激光精密加工 光纤微孔 光纤传感 游标效应 法布里-珀罗传感器 laser optics femtosecond laser precision machining fiber micropores fiber sensing Vernier effect Fabry-Perot sensor
摘要
利用飞秒激光油液辅助的加工方式,在单模光纤端面附近制作出20 μm直径的精密柱形微孔。利用微孔与光纤端面形成了具有明显光拍和游标效应的法布里-珀罗传感器,实现了对环境参数的测量。实验结果显示了传感器对外界温度、湿度、折射率以及气压具有较好的线性响应,传感器具有-0.0669 dB/℃的低温灵敏度、0.74 nm/%RH的湿度灵敏度、6.5 nm/RIU的折射率灵敏度、12.23 pm/℃的高温灵敏度以及1.743 dB/MPa的气压灵敏度。该传感器具有制作简单、性能稳定、结构紧凑等优点。
Abstract
In this paper, a precision cylindrical micropore with a diameter of 20 μm near the end face of a single-mode optical fiber was fabricated by means of femtosecond laser oil-assisted machining method. A Fabry-Perot sensor with obvious light beat and Vernier effect was formed through the micropores and the end face of the optical fiber, which realized the measurement of environmental parameters. Experimental results show that the sensor has a good linear response to external temperature, humidity, refractive index, and gas pressure. The sensor exhibits a cryogenic sensitivity of -0.0669 dB/℃, a humidity sensitivity of 0.74 nm/%RH, a refractive index sensitivity of 6.5 nm/RIU, a high temperature sensitivity of 12.23 pm/℃, and a gas pressure sensitivity of 1.743 dB/MPa. The sensor has the advantages of simple fabrication, stable performance, and compact structure.
王解, 赵宗晨, 江超, 刘昌宁, 孙四梅. 飞秒激光在单模光纤中精密加工微孔及其传感应用[J]. 激光与光电子学进展, 2020, 57(11): 111425. Jie Wang, Zongchen Zhao, Chao Jiang, Changning Liu, Simei Sun. Femtosecond Laser Precision Machining of Micropores in Single-Mode Fiber and Sensing Application[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111425.