Chinese Journal of Lasers B, 1994, 3 (6): 543, 网络出版: 2007-08-17
Study of high precise measurement of large diameters by a dual frequency laser interferometer
Study of high precise measurement of large diameters by a dual frequency laser interferometer
摘要
Abstract
On the basis of analysing error factors of aiming the meaSured points of alarge diameter by a laser beam, a new method of aiming and positioning the measured points in the diameter measurement of a large scale workpiece by a laser beam is put forward in this paper. The high precise measurement of large diameters is realized by using a dual frequency laser interferometCr. The experiment results under different conditions are given. The results of uncertainty (3σ) within 5 μm in measuring a one meter diameter are obtained by the system.
FENG Qibo, LIANG Jinwen. Study of high precise measurement of large diameters by a dual frequency laser interferometer[J]. Chinese Journal of Lasers B, 1994, 3(6): 543. FENG Qibo, LIANG Jinwen. Study of high precise measurement of large diameters by a dual frequency laser interferometer[J]. 中国激光(英文版), 1994, 3(6): 543.
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