中国激光, 2015, 42 (1): 0108003, 网络出版: 2014-12-29
哈特曼波前分析仪校准方法研究
Study on Hartmann Wavefront Analyzer Calibration Method
测量 校准方法 波前测量 自适应光学 波前传感器 哈特曼探测器 哈特曼波前分析仪校准 measurement calibration method wavefront measurement adaptive optics wavefront sensor Hartmann sensor Hartmann wavefront analyzer calibration
摘要
在介绍哈特曼波前分析仪工作原理的基础上,分析了哈特曼探测器微孔阵列面与CCD 面间距LH 参数校准的必要性,提出并讨论了用已知斜率的平面波校准LH 参数,并将平面波斜率值精确溯源至点光源位移量的校准方法。依据此校准方法,实际校准了一台哈特曼波前分析仪,给出了LH 参数的校准值。用校准过的哈特曼波前分析仪测量了三种不同曲率半径的球面波前,与软件构造的相同曲率半径的理想球面波前作比较,波前测量精度达λ/35 ,波前像差PV 值达λ/7 。该实验结果表明,哈特曼波前分析仪校准结果是准确的,校准方法是有效可行的。
Abstract
Based on the principle of Hartmann wavefront analyzer (HWA), the necessity of calibrating pinholes array to CCD spacing LH is clarified. The method of calibrating LH with known gradient plane wave, and tracing gradient value to the point source accuracy displacement, is presented and discussed. According to this calibration method, a HWA is calibrated and corrected value of LH is given. The calibrated HWA measures three spherical wavefronts with different curvature radii. Compared to ideal spherical wavefronts, wavefront measurement accuracy is up to λ/35 , and wavefront aberration peak- valley (PV) value is λ/7 . The experimental results show that calibrated value of HWA is accurate, and given calibration method is effective and feasible.
王艳萍, 王茜蒨, 马冲. 哈特曼波前分析仪校准方法研究[J]. 中国激光, 2015, 42(1): 0108003. Wang Yanping, Wang Qianqian, Ma Chong. Study on Hartmann Wavefront Analyzer Calibration Method[J]. Chinese Journal of Lasers, 2015, 42(1): 0108003.