半导体光子学与技术, 1996, 2 (1): 61, 网络出版: 2011-08-02
Fabrication of Silicon Microlens Arrays Using Ion Beam Milling
Fabrication of Silicon Microlens Arrays Using Ion Beam Milling
摘要
Abstract
A spherical mask for the fabrication of microlens arrays was prepared by melt-ing photoresist,and the spherical photoresist shape was transferred into a silicon substrate using ion beam milling.The ion beam milling process was computer simulated using the Sig-mund ion beam sputtering theory of collision cascades.The experiment results show that mi-crolens arrays can be effectively formed at low substrate temperature of less than 200℃，Shapes and dimensions of photoesist masks and silicon microlens arrays were examined by the scanning electron microscope and tested by the surface stylus measurement.
MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. 半导体光子学与技术, 1996, 2(1): 61. MAI Zhihong, YI Xingjian, ZHAO Xinrong. Fabrication of Silicon Microlens Arrays Using Ion Beam Milling[J]. Semiconductor Photonics and Technology, 1996, 2(1): 61.
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