激光与光电子学进展, 2014, 51 (8): 081203, 网络出版: 2014-07-30
一种多自由度误差同时测量方法
A Multi-Degree-of-Freedom Geometric Errors Measurement Method
摘要
提出一种基于激光准直技术的多自由度误差同时测量方法。采用半导体激光单模光纤组件为光源,分别以角锥棱镜和分光直角棱镜作为二维直线度误差和三维角度误差的敏感器件,实现了直线导轨五自由度误差的同时测量,且测量移动部分无电缆连接。通过理论分析及实验,验证了方法的可行性和可靠性。在设定参数下,直线度、俯仰偏摆角和滚转角误差的测量分辨率可分别达到0.1 μm ,0.1″和0.3″。
Abstract
A novel method for simultaneous measurement of multi-degree-of-freedom geometric errors is presented based on laser collimation technique. A single-mode fiber-coupled laser module is used as source and a corner-cube prism and a splitting rectangular prism are adopted in the moving target to sense the straightness errors and angular errors, respectively. In this way, the horizontal and vertical straightness errors as well as pitch, yaw and roll angle errors can be measured simultaneously. Meanwhile, the moving part is wireless. The theoretical analysis and experimental results show that the method is feasible. With the supposed system parameters, the resolution the straightness, pitch, yaw and roll angle error, can reach to 0.1 μm , 0.1″ and 0.3″, respectively.
翟玉生, 张志峰, 苏玉玲, 王新杰, 冯其波. 一种多自由度误差同时测量方法[J]. 激光与光电子学进展, 2014, 51(8): 081203. Zhai Yusheng, Zhang Zhifeng, Su Yuling, Wang Xinjie, Feng Qibo. A Multi-Degree-of-Freedom Geometric Errors Measurement Method[J]. Laser & Optoelectronics Progress, 2014, 51(8): 081203.