为了实现工业生产过程中温度和溶液质量分数的同时测量和传感检测, 提出了一种由法布里-珀罗干涉仪(FPI)和马赫-曾德尔干涉仪(MZI)级联干涉结构构成的双参数传感器。该传感器由融合在一起的单模光纤(SMF)和空芯光纤(HCF)组成。采用同时测量FPI反射光谱和MZI透射光谱的特征波长位移的方法, 获得了FPI和MZI对温度和折射率的灵敏度差, 建立了传感器温度-质量分数灵敏度矩阵, 实现了传感器双参数的测量。结果表明, 在40℃~150℃的温度范围内, FPI的温度敏感度为10pm/℃, 而MZI的对温度不敏感; 在质量分数0.05~0.40的范围内, FPI对折射率不敏感, 而MZI质量分数灵敏度是232.3nm/RIU; 该传感器可以实现温度与溶液质量分数的同时测量。该研究为石油、化工、电力、钢铁、机械等加工行业中双参数的动态测量提供了参考。

In order to achieve the simultaneous measurement and sensing detection of temperature and solution mass fraction in the industrial production process, a new dual-parameter sensor, which was composed of Fabry-Perot interference (FPI) and Mach-Zehnder interference (MZI) cascading interference structure was proposed. This new type of dual-parameter sensor cascade structure was composed of a single mode fiber (SMF) and a hollow core fiber (HCF) fused together. A method of simultaneously measuring the characteristic wavelength shift of the FPI reflection spectrum and the MZI transmission spectrum was adopted, and then the sensitivity difference between FPI and MZI to temperature and refractive index was obtained. The measurement of dual parameters of the sensor was realized by establishing the sensor temperature-mass fraction sensitivity matrix. The results show that the temperature sensitivity of FPI is 10pm/℃ in the temperature range of 40℃~150℃, while MZI is not sensitive to temperature. In the range of mass fraction 0.05~0.40, FPI is not sensitive to refractive index, while the sensitivity of MZI mass fraction is 232.3nm/RIU. The temperature and solution mass fraction can be measured by using this sensor. The study provides a reference for the dynamic measurement of dual-parameter in the processing industries such as petroleum, chemical, electricity, steel, and machinery.