随着地震勘探的深度越来越大, 地震反射波不断向低频段发展, 迫切要求开发低频传感器。该文设计制备了PZT-5H基压电纤维复合材料(MFC)悬臂梁式传感器, 并将其应用于低频传感领域。通过有限元仿真模拟, 力-电耦合分析探明了MFC悬臂梁结构中基板材料及结构尺寸参数对MFC电输出性能的影响规律, 进而优化结构参数, 研制了低频振动监测用MFC悬臂梁传感元件。对其传感性能进行了测试研究。测试结果表明, MFC悬臂梁可很好地感知低频振动加速度的变化, 在低频段(5~190 Hz)时加速度灵敏度可达205 mV/g(g=9.8 m/s2)。

With the increasing depth of seismic exploration, the seismic reflection waves continue to develop into the low-frequency band, and the development of low-frequency sensors has become an urgent requirement. In this paper, the PZT-5H based macro fibre composite(MFC) cantilever beam sensors for low-frequency sensing applications are designed and fabricated. Through the finite element simulation and the force-electric coupling analysis, the influences of the substrate material and structural size parameters on the electrical output performance of the MFC cantilever beam structure are investigated, and the structural parameters are optimized, and then the MFC cantilever beam sensor for low-frequency vibration monitoring has been developed. The sensing performance is tested and studied, and the results show that the MFC cantilever beam can well sense the change of low-frequency vibration acceleration, and the acceleration sensitivity is up to 205 mV/g(g=9.8 m/s2) at low frequency of 5-190 Hz.